China Claims Chipmaking Gear Advance Despite Tightening US Curbs

  • China improved the resolution of its home-developed DUV gear
  • Country still lags far behind in advanced lithography systems
Companies like SMEE are racing to develop machines that can close the gap with suppliers like ASML Holding NV.Photographer: Qilai Shen/Bloomberg
Lock
This article is for subscribers only.

China has claimed a breakthrough in the development of homegrown chipmaking equipment, an important step in overcoming US sanctions designed to thwart Beijing’s semiconductor goals.

State-linked organizations are advised to use a new laser-based immersion lithography machine with a resolution of 65 nanometers or better, the Ministry of Industry and Information Technology said in an announcement this month. Though the note doesn’t specify the supplier, the spec marks a significant step up from the previous most-advanced indigenous equipment — developed by Shanghai Micro Electronics Equipment Group Co. — which stood at around 90nm.