April 21, 2018 10:07 PM ET

Semiconductors and Semiconductor Equipment

Company Overview of Therma-Wave Inc.

Company Overview

As of May 25, 2007, Therma-Wave Inc. was acquired by KLA-Tencor Corporation. Therma-Wave, Inc. engages in the development, manufacture, and sale of process control metrology systems used in the manufacture of semiconductors. It offers products for the measurement of transparent and semitransparent thin films, and critical dimensions and profile of integrated circuit features. The company’s product families include Therma-Probe, Opti-Probe, and Opti-Probe Critical Dimensions and Real-Time Critical Dimensions. These products use proprietary and patented technology to provide noncontact, nondestructive measurements for the basic building blocks, or process modules, used in the manufacture of in...

1250 Reliance Way

Fremont, CA 94539

United States

Founded in 1982

250 Employees





Key Executives for Therma-Wave Inc.

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