May 21, 2018 2:09 AM ET


Company Overview of Smart Machines, Inc.

Company Overview

As of August 2009, Smart Machines, Inc. was acquired by Brooks Automation Inc. Smart Machines, Inc. produces process tool automation components for transporting semiconductor wafers into and inside of semiconductor process tools. It offers SVR300 series vacuum robots that are used for 200 and 300 millimeter wafer, mask, and disk drive platter handling applications; SAR300 series atmospheric robots, which are used for 200 and 300 millimeter wafer, MR head, and disk drive platter handling applications; SmartAligner series atmospheric and vacuum aligners that are used for rotational alignment of 150, 200, and 300 millimeter wafers; and SmartLift series vacuum elevators, which are used for 150 a...

651 River Oaks Parkway

San Jose, CA 95134

United States

Founded in 1994





Key Executives for Smart Machines, Inc.

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