Nova Measuring Instruments Ltd. engages in the design, development and production of integrated process control systems used in the manufacturing of semiconductors. The company offers optical and X-ray stand-alone metrology systems, as well as integrated metrology units that attach directly to wafer fabrication process equipment. It supplies its metrology solutions to major semiconductor manufacturers worldwide. Products The company’s product portfolio includes a set of in-situ, integrated and stand-alone metrology platforms suited for dimensional, films and material metrology measurements for process control across multiple semiconductor manufacturing process steps, including lithography, etch, chemical mechanical planarization and deposition. Its solutions utilize optical spectral reflectometry and X-ray technologies combined with advanced software modeling and unique algorithmic capabilities and address a range of metrology requirements of its end-user and process equipment manufacturer customers. The company’s fleet management platform addresses the need for high efficiency and productivity in the advanced production lines of its customers, manages large fleets of metrology tools, and is designed to address the needs and working methodologies of metrology and process engineers in the fab. It also provides the hybrid metrology solution that combines data from different toolsets in the fab, such as CD-SEM and X-ray together with its optical metrology to provide improved performance above that of any individual toolset. Primary Products Thin Film and Optical CD Process Control The NovaScan 2040 is the second generation of integrated thickness monitoring systems with improved spectral range, responding to the needs of the industry for emerging chemical mechanical polishing applications of thin films and complex layer stacks. The NovaScan 3090Next is a legacy system still sold into 300mm fabs as the latest and best of the NovaScan line. The NovaScan 3090Next is available as integrated metrology and as stand-alone metrology systems for both thin film and Optical CD (scatterometry) applications. The new generation Nova i500 and i500 Plus integrated metrology features the same metrology as the Nova T500 for complete stand-alone to integrated metrology compatibility. The Nova i500 features advanced metrology for technology nodes smaller than 20nm and high throughput. The Nova T500 stand-alone product family, targeted at technology nodes ranging from 32nm and smaller than 20nm. The Nova T500 features improved metrology performance, improving both accuracy and tool to tool matching, providing throughput of 250WPH using dual metrology units. The Nova T600 is the latest addition to the stand-alone product family, targeted at technology nodes of 2x and beyond. The Nova T600 features multi-channel reflectometry configuration that is optimized for best sensitivity on small features and critical device parameters, such as measurement of high-aspect-ratio structures. Nova T600 is aimed in assisting memory manufacturers in developing their next generation technology in the 1Xnm tech node. The Nova V2600 TSV metrology system enables chipmakers to accelerate the development and improve production yield of multi-chip integrations that rely on TSVs (Through Silicon Vias). The Nova V2600, developed in collaboration with device makers, allows measurement of critical TSV features, such as side-wall angle, bottom diameter, and bottom curvature. This process control solution delivers complete TSV dimensional metrology in a high-throughput production-ready system for the industry’s transition to three-dimensional (3D) integration in production. Nova V2600 collects a dark-field reflectometry spectrum that is highly sensitive to variations in TSV internal structure. The HelioSense 100 platform is the company’s newest stand-alone OCD metrology tool. The HelioSense100 supports the industry transition to multi-patterning small pitch manufacturing and 3D vertical devices by offering a range of metrology measurements that drive tighter process control for the critical parameters in Logic, Flash and DRAM. NovaMars is a
nova measuring instruments
Weizmann Science Park
Phone: 972 73 229 5600
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