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Last $9.43 USD
Change Today +0.08 / 0.86%
Volume 12.5K
As of 8:10 PM 02/10/16 All times are local (Market data is delayed by at least 15 minutes).
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Company Description

Contact Info

Weizmann Science Park

PO Box 266

Rehovot, 7610201


Phone: 972 73 229 5600

Fax: 972 8 940 7776

Nova Measuring Instruments Ltd. operates as a designer, developer, and producer of optical process control solutions used in the manufacturing process of semiconductor integrated circuits. The company offers in-line metrology systems, as well as integrated metrology units that attach directly to process equipment. It supplies its metrology solutions to major semiconductor manufacturers worldwide. Strategy The company’s long-term strategy is focused on advanced metrology and process control solutions where its integrated process control products and stand-alone products are compatible or complementary and used in a customized way to meet specific customer needs. Products The company’s products include metrology systems for thin film measurement in chemical mechanical polishing and chemical vapor deposition applications; optical CD and Metal Line Thickness systems for use in post-copper chemical mechanical polishing applications and optical critical dimension systems for lithography and etch applications. Its integrated thickness monitoring system for chemical mechanical polishing process control enables wafer-to-wafer closed loop control. The company offers various models of integrated thickness monitoring systems, depending on polisher type and end-user requirements. These metrology systems address a range of metrology requirements of its end-user and process equipment manufacturer customers. The company offers various different product models that are tailored to conventional chemical mechanical polishing equipment, as well as to newer, high throughput polishers. Thin Film and Optical CD Process Control The NovaScan 2040 is the second generation of integrated thickness monitoring systems with improved spectral range, responding to the needs of the industry for emerging chemical mechanical polishing applications of thin films and complex layer stacks. The NovaScan 3090Next is a legacy system still sold into 300mm fabs as the latest and best of the NovaScan line. The NovaScan 3090Next is available as integrated metrology and as stand-alone metrology systems for both thin film and Optical CD (scatterometry) applications. The new generation Nova i500 integrated metrology features the same metrology as the Nova T500 for complete to integrated metrology compatibility. The Nova i500 features advanced metrology for technology nodes smaller than 20nm and high throughput that meets the standards of next generation polishers. The Nova T600 is the latest addition to the stand-alone product family, targeted at technology nodes of 2x and beyond. The Nova T600 features multi-channel reflectometry configuration that is optimized for best sensitivity on small features and critical device parameters, such as measurement of high-aspect-ratio structures. Nova T600 is targeted in assisting memory manufacturers in developing their next generation cutting edge technology in the 1Xnm tech node. The Nova V2600 TSV metrology system enables chipmakers to accelerate the development and improve production yield of multi-chip integrations that rely on TSVs (Through Silicon Vias). The Nova V2600, developed in collaboration with device makers, allows measurement of critical TSV features, such as side-wall angle, bottom diameter, and bottom curvature. This process control solution delivers complete TSV dimensional metrology in a high-throughput production-ready system for the industry’s transition to three-dimensional (3D) integration in production. Nova V2600 collects a dark-field reflectometry spectrum that is highly sensitive to variations in TSV internal structure, and has a capability to extend measuring of future TSVs with diameters below 5 microns. NovaMars is a scatterometry modeling and application development software tool enabling complex 2D, 3D, and in-die measurements, as well as Real Time Regression capabilities. Nova Hybrid Metrology solution is part of the company’s holistic metrology approach that utilizes different sources of information that can enhance the overall metrology performance. The Hybrid metrology solution combines data from different toolsets in the fab, such as CD-SEM and XRD together

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