MKS Instruments, Inc. provides instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. The company also provides services relating to the maintenance and repair of its products, software maintenance, installation services and training. Segments The company’s segments include Advanced Manufacturing Capital Equipment, Global Service, Asia Region Sales and Other. The Advanced Manufacturing Capital Equipment segment includes the development, manufacture and sales of instruments, control and vacuum products; and power and reactive gas products, all of which are utilized in semiconductor processing and other similar advanced manufacturing processes. Sales in this segment include both external sales and intercompany product sales, which are recorded at transfer prices in accordance with applicable tax requirements. The Global Service segment includes the worldwide servicing of instruments, control and vacuum products, power and reactive gas products and certain other product groups, all of which are utilized in semiconductor processing and other similar advanced manufacturing processes. The Asia Region Sales segment mainly includes sale of products that are re-sold from the Advanced Manufacturing Capital Equipment and Other segments into Asia regions. The Other segment includes sales of products that are re-sold from the Advanced Manufacturing Capital Equipment into Europe regions, as well as sales from other operating segments. Product Groups The company’s three groups of products are Instruments, Control and Vacuum Products; Power and Reactive Gas Products; and Analytical Solutions Products. Instruments, Control and Vacuum Products This group of products includes pressure and vacuum measurement solutions, materials delivery products, automation and control products and vacuum products. Pressure and Vacuum Measurement Solutions: Each of the company’s pressure measurement and control product lines consists of products that are designed for various pressure ranges and accuracies. Baratron Pressure Measurement Products: These products are typically used to measure the pressure of the gases being distributed upstream of the process chambers, process chamber pressures and pressures between process chambers, vacuum pumps and exhaust lines. Automatic Pressure and Vacuum Control Products: These products enable precise control of process pressure by electronically actuating valves that control the flow of gases in and out of the process chamber to minimize the difference between desired and actual pressure in the chamber. In most cases, Baratron pressure measurement instruments provide the pressure input to the automatic pressure control device. Together, these components create an integrated automatic pressure control subsystem. The company’s pressure control products can also accept inputs from other measurement instruments, enabling the automatic control of gas input or exhaust based on parameters other than pressure. Vacuum Gauging Products: The company offers a range of vacuum instruments consisting of vacuum measurement sensors and associated power supply and readout units, as well as transducers where the sensor and electronics are integrated within a single package. These gauges complement the company’s Baratron capacitance manometers for medium and high vacuum ranges. Granville-Phillips Gauges: The company’s indirect gauges use thermal conductivity and ionization gauge technologies to measure pressure and vacuum levels, and its direct gauges use the pressure measurement technology of a Micro-electromechanical systems (MEMS)-based piezo sensor. Materials Delivery Products: Each of the company’s materials delivery product lines combines MKS flow, pressure measurement and control technologies to provide customers with integrated subsystems and precise control capabilities that are optimized for a given application. Flow Measurement and Control Products: Flow measurement products include gas flow measurement products based upon
mks instruments inc (MKT:Frankfurt)
2 Tech Drive
Andover, MA 01810
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