, phosphine, germanium and boron trifluoride. The third generation of SDS products, called SDS3, maintains all the inherent safety features of previous generation SDS products, but increases the gas storage capacity by using a new adsorbent. The company also offers VAC (Vacuum Actuated Cylinders), a complementary technology to SDS where select implant gases are stored under high pressure but delivered sub-atmospherically. The company’s Wafergard particle and molecular filtration products filter the gas entering the process chamber to eliminate system and wafer problems due to particulate, atmospheric and chemical contaminants. These filters are able to retain all particles 0.003 microns and larger. The company’s metal filters, such as stainless steel and nickel filters, reduce out gassing and improve corrosion resistance. The company’s GateKeeper purifiers chemically react with and absorb contaminants, such as oxygen and water, to prevent contamination; and the company’s Chambergard vent diffusers reduce particle contamination and processing cycle times. The company offers various gas purification products to meet the requirements of semiconductor processing. The company’s GateKeeper Gas Purification Systems contain dual-resin beds, providing a continuous supply of purified gas without process interruption. These gas purification systems are capable of handling higher flow rates and longer duty cycles than cartridge purifiers. The company’s product line also includes filter housings and Vaporsorb hybrid media chemical air filters, which purify air entering tool enclosures and remove airborne molecular contaminants. Advanced Deposition Materials Products Several processes for depositing thin films, such as CVD and atomic layer deposition (ALD) processes are enabled by advanced liquid, gaseous and solid precursors. The company is positioned for the incorporation of ALD processes by the semiconductor industry with its ProE-Vap ampoule. This proprietary container allows for the delivery of low volatility solid precursors required for processes that demand ALD, such as high-k gates. The company has also adapted the carbon adsorption technology used in SDS and incorporated it into products for semiconductor deposition processes marketed under the SAGE brand. These applications include low-k plasma-enhanced deposition, or PE-CVD, processes using low-k materials, pre-metal dielectric high-density plasma, or HDP-CVD, and films using phosphine gases and thermal deposition processes using germane gases. Given the increasing need for new materials used in semiconductor processes, the company is also developing a portfolio of new deposition products to meet the future needs of its customers. Surface Preparation and Integration Products The company provides copper electroplating materials and processes in semiconductor development and manufacturing with its Viaform (a trademark of Enthone Inc.) product, which includes inorganic and proprietary organic molecules that provide the wiring for copper interconnects allowing manufacturers to eliminate processing steps. The company also focuses on the total copper integration scheme with post-CMP cleaning solutions. The company’s ST and AP photoresist strip and post-CMP cleaning materials are proprietary chemistries used for applications, such as semiconductor post-etch residue removal, wafer etching, organics removal, negative resist removal, edge bead removal, and corrosion prevention. In addition to filters for the purification of CMP liquid chemical slurries, the company offers a line of consumable polyvinyl alcohol roller brush products to clean the wafer following the CMP process. The company’s Planarcore polyvinyl alcohol brush is molded on the core to allow easy installation that reduces tool downtime and a dimensionally stable product that provides consistent wafer-to-wafer cleaning performance. In addition, the company’s Planargem pad conditioners, based on its silicon carbide capabilities, offer preparation solutions for each CMP pad application, with improvement in CMP pad life. Other Entegris Products The company also offers its eVOLV wet chemical pro
entegris inc (ENTG:NASDAQ GS)
129 Concord Road
Billerica, MA 01821
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