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February 14, 2016 4:33 AM ET


Company Overview of Mega Fluid Systems, Inc.

Company Overview

Mega Fluid Systems, Inc. engages in engineering, manufacturing, testing, and installing bulk chemical and slurry delivery equipment to semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries in Asia, Europe, North America, and internationally. The company offers a range of total molecular delivery solutions, including bulk chemical delivery systems, chemical blend and delivery systems, bulk slurry delivery systems, and slurry blend and delivery systems; and custom filtration solutions that include dual or quad filter units with optional fine and coarse filtration. It also provides control and SCADA systems with its chemical and slurry delivery tools. In addition, the...

9660 SW Herman Road

Tualatin, OR 97062

United States

Founded in 1990





Key Executives for Mega Fluid Systems, Inc.

Chief Executive Officer, Chief Executive Officer of Ceres Technologies Inc and President of Ceres Technologies Inc
Compensation as of Fiscal Year 2015.

Mega Fluid Systems, Inc. Key Developments

Foundry Selects Mega Fluid Systems Inc for Customized CMP Solutions

Mega Fluid Systems Inc. announced completion of a major tool shipment and installation at U.S.-based foundry. Under the terms of the agreement, Mega designed a slurry/chemical blending and delivery system to be used specifically for supplying dynamic chemistries for CMP polishing applications. Mega's system was chosen because it can be tailored to handle the customer's specific chemistries without affecting their properties, leading to improved process results and lower cost of ownership.

Mega Fluid Systems and Entrepix Join Forces to Offer Complete CMP System

Mega Fluid Systems Inc. and Entrepix Inc. announced a partnership agreement. The combined expertise of both teams has already led to the development of a complete CMP solution for a 200mm fab upgrade project. Mega Fluid Systems designed and built the slurry delivery systems, while Entrepix remanufactured the CMP polish and clean equipment and developed the CMP processes to meet the customer's requirements. The equipment set was designed to efficiently enable a new technology transfer process for the customer. By developing and shipping the slurry blend/delivery, CMP polishing, and post-CMP cleaning equipment set along with proven process recipes optimized for the customer's devices, the companies were able to deliver a highly flexible and reliable solution that will shorten the time to qualify the new process flow. This also ensures that the customer will benefit immediately from many years of established expertise with no 'learning curve' delays.

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