September 24, 2016 6:47 PM ET

Semiconductors and Semiconductor Equipment

Company Overview of Gigaphoton, Inc.

Company Overview

Gigaphoton, Inc. engages in developing, producing, and marketing excimer laser light sources, extreme ultra violet light sources, and lithography light sources for lithography tool suppliers in the semiconductor industry globally. It offers GT64A, an ArF immersion excimer laser supporting wafer multi-patterning lithography; GT63A, an ArF excimer laser for multi-patterning immersion lithography scanners; GT62A for double-patterning immersion lithography tools; GT61A for hyper N.A. immersion lithography tools; GT60A excimer laser model for 45-nm or below technology node; GT40A excimer laser for 65-nm or below technology node; G42A ArF excimer laser for 80-nm technology node; G41A ArF excimer l...

400 Yokokurashinden

Oyama-shi,  323-8558


Founded in 2000


81 2 8528 8410


81 2 8528 8439

Key Executives for Gigaphoton, Inc.

Chief Executive Officer, President and Director
Chief Technology Officer, Vice President and Director
General Manager of Sales and Executive Officer
Senior Executive Officer and Director
Senior Executive Officer, General Manager of the Corporate Planning Division and Director
Compensation as of Fiscal Year 2016.

Gigaphoton, Inc. Key Developments

Gigaphoton Inc. Achieves 250W Light Output at 4.0% Conversion Efficiency with Laser-Produced Plasma Light Source Prototype for EUV Scanners

Gigaphoton Inc. has announced success in achieving 250W light output at 4.0% conversion efficiency with a Laser-Produced Plasma (LPP) light source prototype for EUV scanners, which the company is currently engaged in developing. At this output level, the light sources can be used in high-volume manufacturing of semiconductors. The company also announced its success in achieving 119 hours of continuous operation at over 130W in testing. This result was achieved via the culmination of a number of efforts that the company has continued to develop, including the sub 20 μm micro droplet supply technology, the combination of solid state pre-pulse and CO2 main pulse lasers, improvements in energy control technology, and magnetic field enabled debris mitigation technology. Gigaphoton has also launched operation of a high-power EUV light source verifier designed for use in a semiconductor high-volume manufacturing environment, and is committed to continuing the development of EUV light sources with high operational rates and reliability in an aim to facilitate their implementation in the high-volume manufacturing of semiconductors.

Gigaphoton Inc to Introduce New Excimer Laser to Flat Panel Display Industry

Gigaphoton Inc. announced the successful development of a new series of excimer lasers, the GIGANEX series, an application of Gigaphoton’s highly reliable semiconductor lithography excimer laser technology. In addition, Gigaphoton announced shipment for low-temperature polycrystalline silicon (LTPS) at large-scale liquid crystal display (LCD) manufacturing plants, mounting the GIGANEX excimer lasers on ultra-compact laser annealing equipment from V-Technology Co. Ltd., a company listed in the first section of the Tokyo Stock Exchange as 7717. The new GIGANEX series excimer lasers for annealing was developed for exclusive use with equipment from V-Technology for use as a light source during the ultra-compact laser annealing process. By incorporating the ultra-compact laser annealing process characteristics into the existing a-Si panel manufacturing process to crystallize the a-Si into poly-silicon (p-Si), enables the manufacturing of incredibly detailed panels, such as 8K panels, which were previously impossible to create using older a-Si processes. The new process is also suited to larger panel production, affording support for large-scale manufacturing plants that manufacture TV panels ranging from 50 to 70 inches, diagonally. This could not have been possible with existing laser annealing processes.

Gigaphoton, Inc. Announces its New Excimer Laser Brand GIGANEX

Gigaphoton, Inc. announced its new excimer laser brand GIGANEX on April 1, 2016. Since its establishment in August 2000, Gigaphoton has been providing valuable solutions to semiconductor manufacturers throughout the world as a semiconductor lithography light source manufacturer. Over fifteen years, Gigaphoton's excimer lasers and support services have clearly been gaining the trust of users, and there are now about 1,300 lasers in mass production operations at semiconductor manufacturers around the world. Gigaphoton has announced they will develop a highly reliable excimer laser, GIGANEX, utilizing their considerable technical capabilities acquired by their experience in semiconductor lithography, for use in the fields of FPD production, flexible device processing, semiconductor fabrication, etc. Moving forward, Gigaphoton intends to explore further possibilities in excimer lasers, together with new innovative partners, to provide GIGANEX solutions.

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