Bloomberg Anywhere Remote Login Bloomberg Terminal Request a Demo


Connecting decision makers to a dynamic network of information, people and ideas, Bloomberg quickly and accurately delivers business and financial information, news and insight around the world.


Financial Products

Enterprise Products


Customer Support

  • Americas

    +1 212 318 2000

  • Europe, Middle East, & Africa

    +44 20 7330 7500

  • Asia Pacific

    +65 6212 1000


Industry Products

Media Services

Follow Us

Last $3.23 USD
Change Today +0.01 / 0.31%
Volume 232.0K
ACLS On Other Exchanges
As of 8:10 PM 09/4/15 All times are local (Market data is delayed by at least 15 minutes).

Executive Profile*

Mary G. Puma

Chief Executive Officer, President and Director,Axcelis Technologies Inc.
AgeTotal Calculated CompensationThis person is connected to 55 board members in 4 different organizations across 4 different industries.

See Board Relationships
As of Fiscal Year 2014


Ms. Mary G. Puma serves as the Chief Executive Officer and President at Axcelis Technologies Inc. From May 2000 to January 2002, Ms. Puma served as Axcelis Technologies Inc.'s President and Chief Operating Officer, prior to which she served as Vice President of Axcelis Technologies Inc. from February 1999 to May 2000. From January 1998 to February 1999, she served as General Manager and Vice President of the Implant Systems Division of Eaton Corporation. From May 1996 ...

Read Full Background

Corporate Headquarters*

108 Cherry Hill Drive
Beverly, Massachusetts 01915

United States

Phone: 978-787-4000
Fax: 978-787-3000

Board Members Memberships*

Chief Executive Officer, President and Director
Independent Director, Chairman of Compensation Committee, Member of Executive Committee and Member of Governance & Nominating Committee
Director and Member of Audit Committee


Bachelor's Degree
Tufts University
Master's Degree
MIT Sloan School of Management

Other Affiliations*

Annual Compensation*

Total Annual Compensation$492,885

Stock Options*

Exercisable Options1,125,000
Exercisable Options Value$1,474,375
Unexercisable Options675,000
Unexercisable Options Value$598,625
Total Value of Options$2,073,000
Total Number of Options1,800,000

Total Compensation*

Total Annual Cash Compensation$492,885
Total Short Term Compensation$492,885
Total Calculated Compensation$781,869
*Data is at least as current as the most recent Definitive Proxy.

Stock Quotes

Market data is delayed at least 15 minutes.

Company Lookup
Recently Viewed
ACLS:US $3.23 USD +0.01


Jeffrey S. Rittichier Chief Executive Officer, President and Director
EMCORE Corporation
Timothy J. Stultz Ph.D.Chief Executive Officer, President and Director
Nanometrics Incorporated
David H. Li Chief Executive Officer, President and Director
Cabot Microelectronics Corporation
Hideaki Obata President and Representative Director
Nissin Electric Co. Ltd.
Kyung-Soo Park Chief Executive Officer
PSK Inc.
Compensation as of Fiscal Year --.

Sponsored Financial Commentaries

Sponsored Links

Report Data Issue

To contact AXCELIS TECHNOLOGIES INC, please visit . Company data is provided by Capital IQ. Please use this form to report any data issues.

Please enter your information in the following field(s):
Update Needed*

All data changes require verification from public sources. Please include the correct value or values and a source where we can verify.

Your requested update has been submitted

Our data partners will research the update request and update the information on this page if necessary. Research and follow-up could take several weeks. If you have questions, you can contact them at