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As of 8:10 PM 02/27/15 All times are local (Market data is delayed by at least 15 minutes).

Executive Profile*

Mary G. Puma

Chairman, Chief Executive Officer and President, Axcelis Technologies Inc.
AgeTotal Calculated CompensationThis person is connected to 59 board members in 4 different organizations across 4 different industries.

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As of Fiscal Year 2013


Ms. Mary G. Puma serves as the Chief Executive Officer and President at Axcelis Technologies Inc. From May 2000 to January 2002, Ms. Puma served as Axcelis Technologies Inc.'s President and Chief Operating Officer, prior to which she served as Vice President of Axcelis Technologies Inc. from February 1999 to May 2000. From January 1998 to February 1999, she served as General Manager and Vice President of the Implant Systems Division of Eaton Corporation. From May 1996 ...

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Corporate Headquarters*

108 Cherry Hill Drive
Beverly, Massachusetts 01915

United States

Phone: 978-787-4000
Fax: 978-787-3000

Board Members Memberships*

Former Director
Chairman, Chief Executive Officer and President
Independent Director, Chairman of Compensation Committee, Member of Executive Committee and Member of Governance & Nominating Committee
Director and Member of Audit Committee


Bachelor's Degree
Tufts University
Master's Degree
MIT Sloan School of Management

Other Affiliations*

Annual Compensation*

Total Annual Compensation$400,481

Stock Options*

Restricted Stock Awards$187,499
Exercisable Options1,075,000
Exercisable Options Value$1,111,875
Unexercisable Options625,000
Unexercisable Options Value$553,125
Total Value of Options$1,665,000
Total Number of Options1,700,000

Total Compensation*

Total Annual Cash Compensation$400,481
Total Short Term Compensation$400,481
Other Long Term Compensation$187,499
Total Calculated Compensation$947,696
*Data is at least as current as the most recent Definitive Proxy.

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Compensation as of Fiscal Year --.

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