Executive Profile*

Fusen Ernie Chen Ph.D.

Chief Executive Officer and President,Mattson Technology Inc.
AgeTotal Calculated CompensationThis person is connected to 18 board members in 3 different organizations across 6 different industries.

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As of Fiscal Year 2015


Dr. Fusen Ernie Chen, Ph.D., has been the President and Chief Executive Officer of Kulicke and Soffa Industries, Inc. since October 31, 2016. Dr. Chen has been the Chief Executive Officer and President of Mattson Technology Inc. since February 19, 2013. Dr. Chen served as an Executive Vice President of Novellus Systems Inc. since October 3, 2005 and its Executive Vice President of Semiconductor Systems Products since October 2005. He served as the Chief Technology ...

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Corporate Headquarters*

47131 Bayside Parkway
Fremont, California 94538

United States

Phone: 510-657-5900
Fax: 510-492-5911

Board Members Memberships*

Independent Director, Chairman of Compensation Committee and Member of Audit Committee
Chief Executive Officer, President and Director


Tsinghua University
State University of New York at Stony Brook

Other Affiliations*

Annual Compensation*

There is no Annual Compensation data available.

Stock Options*

There is no Stock Options data available.

Total Compensation*

There is no Total Compensation data available.
*Data is at least as current as the most recent Definitive Proxy.

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Richard W. Blickman Chairman of Management Board, Chief Executive Officer and President
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Takayuki Tokuma Executive President and Representative Director
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Dong-Shin Kwak Vice Chairman, Chief Executive Officer and President
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Compensation as of Fiscal Year 2015.

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