Edwards to Supply Pumps for Granville-Phillips’ Vacuum Quality Monitor (VQM™) Systems

  Edwards to Supply Pumps for Granville-Phillips’ Vacuum Quality Monitor
  (VQM™) Systems

   Granvillle-Phillips® 835 VQM^TM Differential Pump System to include EXT
                       turbomolecular pump from Edwards

Business Wire

CRAWLEY, England -- December 10, 2013

Edwards Group Limited (NASDAQ: EVAC), a leading manufacturer of sophisticated
vacuum products and abatement systems and a global provider of related
value-added services, is to supply the EXT75DX compound turbomolecular pump to
Granville-Phillips® to form a part of their 835 Vacuum Quality Monitor (VQM™)
Differential Pump System. The 835 VQM Differential Pump System (DPS) provides
real-time information that can be used to optimize physical vapour deposition,
ion implant, reactive ion etch and any vacuum dependent process, particularly
in solar and semiconductor manufacturing, and also for vacuum system
monitoring and diagnostics in a wide range of other vacuum processes in thin
film coating, research and development, high energy physics or other
applications where precise understanding of the vacuum environment is
critical.

(Photo: Business Wire) Granville-Phillips' 835 VQM Differential Pump System
including EXT turbomolec ...

(Photo: Business Wire) Granville-Phillips' 835 VQM Differential Pump System
including EXT turbomolecular pump from Edwards

Edwards has been working with Granville-Phillips, part of Brooks Automation
Inc, on their 835 VQM DPS, a diagnostic tool used to monitor the quality of
the vacuum environment in a variety of vacuum systems. A pressure differential
between the vacuum chamber and the VQM gauge is achieved by limiting the
conductance to the sensor using an orifice in the systems gate valve, and
pumping the sensor with a turbopump. This enables the VQM DPS to monitor the
vacuum quality of a system at pressures between 3 Torr and 5x10^-9 Torr.

The key reasons that Granville-Phillips selected Edwards’ EXT75DX compound
turbopump were its ultra clean ultra high vacuum performance, low vibration,
high backing pressure tolerance, low power usage, and the compact size.

Crucial to Granville-Phillips’ decision making process was that Edwards were
able to supply a product that would be rugged and dependable, in line with
their GUTS® (Guaranteed Up Time Support) program, to ensure reliable
performance for their customers using this system.

David Steele, Market Sector Manager at Edwards, commented, “The VQM’s
innovative design sets it apart from conventional gas analysis tools. Edwards
is committed to supplying the highest quality vacuum system to
Granville-Phillips with the right performance and the right price.”

For further information about Edwards products please visit
www.edwardsvacuum.com.

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Contact:

Edwards Group Limited
Rebecca Walder
+44 (0) 1293 603103
Rebecca.Walder@edwardsvacuum.com
 
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