Axcelis Wins Multiple System Order For 'Purion XE' High Energy Implanter For New Fab In Asia

 Axcelis Wins Multiple System Order For 'Purion XE' High Energy Implanter For
                               New Fab In Asia

Innovative Platform Delivers Industry Leading Purity, Precision and
Productivity to Meet Future Process Challenges as Well as Today's Production

PR Newswire

BEVERLY, Mass., Oct. 22, 2013

BEVERLY, Mass., Oct.22, 2013 /PRNewswire/ --Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry, announced that it has received a multiple system
order for the Company's new Purion XE single wafer, high energy implanter.
The systems will be installed at the customer's new fab in the Asia Pacific
Region, and will be used in high volume production of advanced NAND devices.
The systems will ship in Q4. Axcelis expects to receive additional follow-on
orders as manufacturing capacity at the new fab expands.

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John Aldeborgh, executive vice president, customer operations, said, "We are
pleased to expand our installed base with this industry leader and look
forward to collaborating closely with them as they ramp their manufacturing
capacity. The Purion XE is the industry's most advanced high energy system
available today, and provides customers with unique, compelling solutions to
meet the demands of high volume, next generation device manufacturing."

The Purion XE

The Purion XE is the industry's most advanced high energy implanter. The
system leverages the Purion platform to deliver absolute beam purity and the
most precise dopant placement possible, while ensuring the highest levels of
productivity and capital efficiency. The Axcelis single wafer LINAC
technology is the industry benchmark for high energy productivity and lowest
cost of ownership, while providing customers remarkable manufacturing
flexibility with true medium current capability. Each member of the Purion
family shares a common, powerful 500+ wafers per hour end station, industry
leading source technology and an innovative and precise ultra-pure beam line.

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. Learn more about Axcelis at

Forward Looking Statements:

The statement in this press release regarding Axcelis' expectations for
additional orders from this fab is a "forward-looking statement." While it
expresses the current expectations of Axcelis management, certain risks and
uncertainties could cause actual results to differ materially from those
currently anticipated. Among other factors, such risks and uncertainties
include the continuing demand for semiconductor equipment, relative market
growth, continuity of business relationships with major customers, competitive
pressure on sales and pricing, increases in material and other production
costs that cannot be recouped in product pricing and global economic and
financial conditions. These risks and other risk factors relating to Axcelis
are described more fully in the most recent Form 10-K filed by Axcelis and in
other filings from time to time with the Securities and Exchange Commission.


Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

SOURCE Axcelis Technologies, Inc.

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