Axcelis Announces Order For 'Purion M' Medium Current Implanter

       Axcelis Announces Order For 'Purion M' Medium Current Implanter

Exceeds Customer Expectations, Closing Successful Evaluation with Leading Chip
Manufacturer

PR Newswire

BEVERLY, Mass., Oct. 2, 2013

BEVERLY, Mass., Oct. 2, 2013 /PRNewswire/ --Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry,announced today that it has received an order for
the Company's innovative, new Purion MTM medium current implanter. The new
system is installed at one of the world's leading chip manufacturers in Asia,
where it is being used in high volume manufacturing of advanced, next
generation devices.

(Photo: http://photos.prnewswire.com/prnh/20131002/NE90498 )
(Logo: http://photos.prnewswire.com/prnh/20130905/NE75070LOGO )

Bill Bintz, executive vice president of product development, engineering and
marketing commented, "This order marks the closure of a very successful
evaluation with a very important customer and sets the stage for significant
follow on business. The Purion M exceeded our customer's expectations in
multiple critical performance categories - delivering enabling process
capabilities, greatly reducing the customer's operating costs and advancing
sustainable manufacturing goals."

The Purion M is designed to support the industry's move to the sub 10nm era,
enabling semiconductor manufacturers to deliver faster devices for next
generation mobile computing power.
The system transcends the current generation of medium current implanters,
offering a wide array of technological innovations in high volume production
of the world's most advanced devices:

  oUnmatched Contamination Control - As devices continue to scale,
    sensitivity to contamination is of paramount concern. The Purion M's
    innovative beamline demonstrates an impressive reduction of particulate
    contamination in comparison to the competition, as well as the industry's
    lowest levels for metal contamination, enabling the highest production
    yields.
  oReduced Energy Consumption - the Purion M's system architecture advances
    our customers' efforts towards more sustainable manufacturing practices,
    through a combination of energy efficiency and high productivity. The
    system's single magnet beamline design, coupled with the industry's
    highest levels of productivity, achieves a reduction in total energy
    consumption by >50% per wafer in comparison to the competition.
  oMaximized Productivity – The Purion M utilizes Axcelis' precision spot
    beamline technology coupled with a 500 WPH single wafer platform. This
    combination provides exceptional reliability, and remarkable precision and
    productivity for the widest range (2keV - 1MeV) of low energy and mid dose
    applications, especially well, channel and HALO processes. During this
    recent evaluation, the system provided the customer with a remarkable
    improvement in total productivity in comparison to the competition.

Learn more about the Purion M at www.axcelis.com.

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

SOURCE Axcelis Technologies, Inc.

Website: http://www.axcelis.com