Gigaphoton Develops CO2 Drive Laser for High Output EUV Light Sources
Achieved stable 15W EUV output on prototype system – marking another critical
step forward toward achieving high power LPP light sources for EUV lithography
OYAMA, Japan -- September 30, 2013
Gigaphoton Inc., a major lithography light source manufacturer, announced
today that the company has jointly developed a high power CO drive laser
for Extreme Ultraviolet (EUV) light sources with Mitsubishi Electric
Corporation, a leading manufacturer of electrical and electronic equipment.
Likewise, an average output level of 15W was achieved on a development EUV
system – representing another step forward in realizing production level EUV
The 15W EUV light output was confirmed on a prototype EUV light source.
Furthermore, initial experiments conducted on the jointly developed CO
drive laser have produced output power of over 20kW, signifying that a key
piece of technology necessary for producing EUV output levels of 250W which is
necessary for high volume manufacturing (HVM) has been realized.
Gigaphoton has focused on developing high output, stable, and economical LPP
light sources since 2002. During that time, Gigaphoton has introduced several
unique technologies that have received industry-wide attention. The recent
achievements can be attributed to Gigaphoton’s highly advanced technical
capabilities, bringing the company one step closer to achieving mass
production of LPP light sources.
“I am very pleased that the CO driver laser jointly developed with
Mitsubishi Electric Corporation has demonstrated sufficient output levels
necessary for production and that our unique LPP light source technology is
showing firm progress towards high volume production level output” said
Hitoshi Tomaru, President and CEO of Gigaphoton. “This also demonstrates
progress towards realizing our vision for a Green, environmentally friendly
LPP light source. Our efforts will help to bring the industry closer to
realizing EUV lithography scanners for high volume manufacturing.”
Gigaphoton is striving to offer the most environmentally friendly, cost
effective, and powerful EUV light source possible through unique technologies
such as double pulse laser produced plasma (LPP) and debris mitigation using
Tin (Sn) droplets are irradiated using a high-energy pulse driver laser to
create Tin plasma which is used to generate the EUV light. Improving the
conversion efficiency of the EUV light generation and achieving efficient and
effective mitigation of debris from the collector mirror are key issues that
must be resolved for production level EUV light sources.
Highly efficient EUV output is possible through Gigaphoton’s unique technology
based on the optimized use of a short wavelength solid-state pre-pulse laser
in conjunction with a CO main pulse laser. Efficient and effective debris
mitigation is also possible through Gigaphoton’s unique method of utilizing a
superconducting magnet to generate a powerful magnetic field that guides the
unwanted debris resulting from the thermal expansion of the Tin droplets
towards the Tin catcher. This results in further reduction of cost and
Gigaphoton will continue to pursue breakthrough achievements in technology to
bring the industry closer to realizing EUV lithography tools for high volume
Since its founding in 2000, Gigaphoton has developed and delivered
user-friendly, high-performance DUV laser light sources used by major
semi-conductor chipmakers in the Pan-Asian, US and European regions.
Gigaphoton's patented, innovative LPP EUV technology solutions lead the way to
cost-effective, highly productive lithography sources for high-volume
production. With a global business outlook, Gigaphoton strives to be the
world’s number-one lithography light source provider, focusing on end-user
needs in every phase of its business, from research and development to
manufacturing to best-in-class reliability and world-class customer support.
For more information please visit http://www.gigaphoton.com/?lang=en
Katsutomo Terashima, +81-(0)285-28-8410
Corporate Planning Division
Naoto Hisanaga, +81-(0)285-28-8415
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