Cabot Microelectronics Corporation Announces Adoption of Novus(tm) A7100 Aluminum CMP Slurry for Advanced Node High-K Metal Gate

Cabot Microelectronics Corporation Announces Adoption of Novus(tm) A7100
Aluminum CMP Slurry for Advanced Node High-K Metal Gate Logic Process

Aurora, IL, Aug. 28, 2013 (GLOBE NEWSWIRE) -- Cabot Microelectronics
Corporation (Nasdaq: CCMP), the world's leading supplier of chemical
mechanical planarization (CMP) polishing slurries and a growing CMP pad
supplier to the semiconductor industry, today announced that its Novus A7100
Aluminum CMP slurry products have been adopted by several leading edge
customers to help enable 28/20 nanometer High-K Metal Gate integration schemes
used for advanced logic devices.

The Novus  A7100 Aluminum  slurry  product platform  is  the result  of  Cabot 
Microelectronics' industry-leading CMP technology  and extensive research  and 
development in  close collaboration  with  strategic customers.  Novus  A7100 
contains a combination of unique engineered abrasive particles and proprietary
chemistry to remove  aluminum and  the complex stack  of work-function  metals 
within the transistor gates of advanced semiconductor logic devices. This CMP
solution was  designed to  polish aluminum  and then  stop on  the  underlying 
dielectric material  and therefore  minimize dielectric  material erosion  and 
aluminum recess. Novus A7100  is formulated to  optimize removal rate,  limit 
erosion and recess, and meet low defect requirements.

Charles Chen, Cabot Microelectronics'  Global Business Director, stated,  "The 
Novus A7100 Aluminum CMP slurry provides  our customers with a solution for  a 
critical process  step in  enabling High-K  Metal Gate  device integration  at 
advanced technology nodes. We  believe the extremely  low recess levels  that 
can be achieved across a wide range of feature sizes and densities, results in
better device reliability and transistor performance."


Cabot Microelectronics Corporation, headquartered in Aurora, Illinois, is  the 
world's leading  supplier of  CMP polishing  slurries and  a growing  CMP  pad 
supplier to  the  semiconductor  industry.  The  company's  products  play  a 
critical role in  the production of  advanced semiconductor devices,  enabling 
the manufacture of smaller, faster and more complex devices by its customers.
The company's mission is to create value by developing reliable and innovative
solutions, through close customer collaboration, that solve today's challenges
and help enable tomorrow's technology.  Since becoming an independent  public 
company in 2000, the company has  grown to approximately 1,050 employees on  a 
global basis. For more information about Cabot Microelectronics  Corporation, 
visit  or  contact  Trisha  Tuntland,  Manager  of  Investor 
Relations at 630-499-2600.


This news release may include statements that constitute "forward looking
statements" within the meaning of federal securities regulations.

These forward-looking statements include statements related to:

future sales and operating results; company and industry growth, contraction
or trends; growth or contraction of the markets in which the company
participates; international events, regulatory or legislative activity, or
various economic factors; product performance; the generation, protection and
acquisition of intellectual property, and litigation related to such
intellectual property; new product introductions; development of new products,
technologies and markets; natural disasters; the acquisition of or investment
in other entities; uses and investment of the company's cash balance;
financing facilities and related debt, payment of principal and interest, and
compliance with covenants and other terms; the company's capital structure;
and the construction and operation of facilities by Cabot Microelectronics

These forward-looking statements involve a number of risks, uncertainties, and
other factors, including those described from time to time in Cabot
Microelectronics' filings with the Securities and Exchange Commission (SEC),
that could cause actual results to differ materially from those described by
these forward-looking statements.

In particular, see "Risk Factors" in the company's quarterly report on Form
10-Q for the quarter ended June 30, 2013 and in the company's annual report on
Form 10-K for the fiscal year ended September 30, 2012, both filed with the

Cabot Microelectronics assumes no obligation to update this forward-looking

CONTACT: Trisha Tuntland
         Manager, Investor Relations

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