Axcelis Receives Follow-on Order for Optima HDx High Current Implanter

    Axcelis Receives Follow-on Order for Optima HDx High Current Implanter

Optima HDx Tool of Record for High Volume, Cold Implant Applications

PR Newswire

BEVERLY, Mass., July 30, 2013

BEVERLY, Mass., July 30, 2013 /PRNewswire/ -- Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry, announced that it has received a follow-on order
for the Optima HDx high current implanter from one of the world's leading
chipmakers located in the Asia Pacific region. The Optima HDx will be used in
high volume manufacturing of leading edge memory products and next generation
device development. The system is scheduled to ship in the third quarter.

"We're pleased to be able to build on our relationship with this important
customer and expand our installed base of Optima HDx implanters," said John
Aldeborgh, executive vice president, customer operations. "This order extends
our market leading position for systems that provide cold implant capability
for chipmakers realizing the benefits of Axcelis' unique damage engineering
solution to achieve leading edge device performance. The Optima HDx combines
maximum dose rates, inherently found in its spot beam technology, with
proprietary wafer temperature control during implantation, providing maximum
productivity and process advantages."

The Optima HDx high current implanter provides solutions for device
manufacturers' highest dose requirements with the versatility and
extendibility to provide solutions beyond today's 2Xnm technology node. The
Optima HDx includes the industry's most advanced ion source technology,
coupled with Axcelis' innovative wafer temperature control system that
maximizes yield and profitability, both of which are critical in today's
challenging device manufacturing environment. The Optima HDx delivers this
performance with a simple, low cost and highly reliable design, providing a
significant advantage over more complex and costly designs. For more
information on the innovative Optima HDx and our complete line of ion
implantation systems, please visit

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. The Company's Internet address is:

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

SOURCE Axcelis Technologies, Inc.

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