Axcelis Receives Order For Optima HDx High Current Implanter From Leading Foundry

  Axcelis Receives Order For Optima HDx High Current Implanter From Leading

Production Proven Platform Provides Unprecedented Carbon Source Life
Performance for Powerful COO Advantage

PR Newswire

BEVERLY, Mass., July 25, 2013

BEVERLY, Mass., July 25, 2013 /PRNewswire/ --Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry, announced that it has received an order for its
Optima HDx high current implanter from one of the world's leading foundries.
The system features the Company's Eterna ELS3 Source, which delivers over 500
hours of source life for carbon and germanium species, for a compelling cost
of ownership advantage.

"We're pleased to be able to offer our customers the industry's most advanced
ion source technology," said Bill Bintz, Executive Vice President of Product
Development, Engineering and Marketing. "The Eterna ELS3 has delivered truly
remarkable source life performance in high volume production of carbon
applications at this site, providing significant cost savings for the
customer. We're excited about this order, and look forward to expanding our
high current implant installed base." The Eterna ELS3 includes patent pending
hardware and process improvements designed to extend source life by an
unprecedented 500% improvement for carbon, and a 500% improvement for
germanium applications. The system is available as an option on new Optima HDx
tools, as well as an upgrade to installed systems.

The Optima HDx high current implanter provides solutions for device
manufacturers' highest dose requirements with the versatility and
extendibility to provide solutions beyond today's 2Xnm technology node. The
Optima HDx includes the industry's most advanced ion source technology,
coupled with Axcelis' innovative wafer temperature control system that
maximizes yield and profitability, both of which are critical in today's
challenging device manufacturing environment. The Optima HDx delivers this
performance with a simple, low cost and highly reliable design, providing a
significant advantage over more complex and costly designs. For more
information on the innovative Optima HDx and our complete line of ion
implantation systems, please visit

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. The Company's Internet address is:

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552 

SOURCE Axcelis Technologies, Inc.

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