Edwards’ IPUP2 Vacuum Pump Sets New Standards for Load Lock and Transfer
Advanced design of 2^nd generation pump achieves early success.
CRAWLEY, England -- July 9, 2013
Edwards Group Limited (NASDAQ: EVAC), a leading manufacturer of sophisticated
vacuum products and abatement systems and a global provider of related
value-added services, has introduced a new integrated point-of-use pump, the
IPUP2™, for load lock and transfer chamber applications on Applied Materials’
manufacturing platforms. The 2^nd generation pump offers significant
advantages in load lock pump down time, energy consumption and maintenance
requirements that together, deliver best-in-class performance and
cost-of-ownership. The pump has achieved early success, with qualification on
several new Applied Materials’ platforms and initial shipments of over 180
systems to major semiconductor manufacturers.
“We worked very hard to meet and exceed Applied Materials’ requirements for
this new generation of pumps,” said Mark Greene, General Manager of Sales,
Edwards. “Its advanced design reduces pump down times by about 50 percent, it
uses 70 percent less energy and requires no maintenance between overhauls.
Semiconductor manufacturers – even those who have a long history with
competitive suppliers – have been quick to acknowledge the IPUP2 throughput
and cost-of-ownership benefits with hard orders.”
The IPUP2 was designed to meet Applied Materials’ specifications for load lock
and transfer chamber pumping. The pumping speed and power curve of the IPUP2
have been optimised to increase tool throughput, achieving a peak pumping
speed (180 m^3/h) 89 percent faster and pump down times up to 54 percent
faster than 1^st generation pumps, while using 70 percent less energy
(additional energy savings can be achieved using Green Mode). Precision
bearings throughout the pump ensure smooth, low vibration operation, while oil
lubrication of bearings and timing gears eliminate the need for routine
maintenance between major overhauls. The IPUP2 includes horizontal and
vertical inlets and its size and configuration permit direct swaps with
previous generation pumps. In testing, the pump scored highly with a mean time
between failures (MTBF to Semi E10 standards) of over five years with in
excess of 3,000,000 load lock cycles.
The IPUP2 is available now on Applied Materials’ tools or directly from
Edwards. For further information, please contact your local sales
Edwards is a leading developer and manufacturer of sophisticated vacuum
products, abatement systems and related value-added services. These are
integral to manufacturing processes for semiconductors, flat panel displays,
LEDs and solar cells; are used within an increasingly diverse range of
industrial processes including power, glass and other coating applications,
steel and other metallurgy, pharmaceutical and chemical; and for both
scientific instruments and a wide range of R&D applications.
Edwards has over 3,200 full-time employees and 500 temporary workers operating
in approximately 30 countries worldwide engaged in the design, manufacture and
support of high technology vacuum and exhaust management equipment.
Edwards’ American Depositary Shares trade on The NASDAQ Global Select Market
under the symbol EVAC. Further information about Edwards can be found at
+44 (0) 1293 603103
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