Axcelis Technologies Strengthens Cash Position

                Axcelis Technologies Strengthens Cash Position

PR Newswire

BEVERLY, Mass., July 9, 2013

BEVERLY, Mass., July 9, 2013 /PRNewswire/ --Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry, announced today that it has closed a $15 million
three year term loan with Northern Bank & Trust Company, Woburn, MA. The loan
is secured by a mortgage on Axcelis' headquarters facility in Beverly. The
proceeds will be available as needed to fund growth, specifically investments
in the leading edge Purion ion implant platform.

"With the market improving and the demand for our Purion platform based
products increasing, having a strong cash balance is critical," stated Mary
Puma, Chairman and CEO. "This loan allows Axcelis to tap into the value we
have in our facility and almost 60 acres of property to further strengthen our
balance sheet. We want to thank Northern Bank & Trust for providing Axcelis
the opportunity to partner with a Massachusetts bank to support the global
growth of a local high technology company."

Axcelis Technologies, Inc. (Nasdaq: ACLS), headquartered in Beverly, Mass.,
has been providing innovative, high-productivity solutions for the
semiconductor industry for over 35 years. Axcelis is dedicated to developing
enabling process applications through the design, manufacture and complete
life cycle support of ion implantation systems, one of the most critical and
enabling steps in the IC manufacturing process. The Company's Internet address

Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

SOURCE Axcelis Technologies, Inc.

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