New TDK Nitrogen Purge FOUP Loadport Models Launched

  New TDK Nitrogen Purge FOUP Loadport Models Launched

TDK developed and launched the 300mm and 450mm SEMI compliant loadports with
Hybrid^TM N[2] Purge

SEMICON West 2013

Business Wire

LINCOLNSHIRE, Ill. -- July 3, 2013

TDK Corporation, the world’s leading supplier of loadports, will feature
Hybrid^TM N[2] Purge loadports for the next generation FABs at SEMICON West
2013 at the Moscone Convention Center in San Francisco, July 9-11. TDK 300mm
and 450mm N[2] loadports will be on display at booth 913 located in the South

TDK N[2] purge loadports are an effective solution to reduce wafer cross
contamination between processes and oxidation. TDK Hybrid^TM N[2] Purge uses a
combination of bottom and front door purge systems to maximize process and
cost benefits to the Semiconductor FAB.

The TDK N[2] front purge loadport, which is currently being qualified by
leading process tool manufacturers, has the advantage of large gas flow
available for fast purge, purge nozzles located inside the EFEM, and
capability to maintain low humidity and low particles inside the FOUP. Front
purge uses existing FOUPs and no mass flow controller is required for front
N[2] purge.

N[2] bottom purge uses semi compliant N[2] purge FOUPs. The FOUP door may be
closed during N[2] bottom purge. Nitrogen purge is found to be effective to
improve Cu interconnect reliability. With the demands of ITRS for smaller
nodes, TDK Corporation with over 10 years’ experience with N[2] purge systems
is working to meet the market requirements with innovative mini environment

About TDK Corporation

TDK Corporation is a leading electronics company based in Tokyo, Japan. It was
established in 1935 to commercialize ferrite, a key material in electronic and
magnetic products. TDK's portfolio includes electronic components, modules and
systems which are marketed under the product brands TDK and EPCOS, power
supplies, magnetic application products as well as energy devices, flash
memory application devices, and others. TDK focuses on demanding markets in
the areas of information and communication technology and consumer, automotive
and industrial electronics. The company has a network of design and
manufacturing locations and sales offices in Asia, Europe, and in North and
South America. In fiscal 2013, TDK posted total sales of USD 9.1 billion and
employed about 80,000 people worldwide


TDK Corporation of America
Sara Lambeth, 972-409-4519
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