Axcelis Announces Retirement Of CFO

                     Axcelis Announces Retirement Of CFO

Kevin Brewer to Take Interim CFO Role During Search

PR Newswire

BEVERLY, Mass., June 20, 2013

BEVERLY, Mass., June 20, 2013 /PRNewswire/ --Axcelis Technologies, Inc.
(NASDAQ: ACLS) today announced CFO Jay Zager will be retiring from the company
at the end of August, 2013. Effective July 1, 2013 Kevin Brewer will become
executive vice president and interim chief financial officer, continuing his
role as executive vice president, global operations. Zager will retain the
title of executive vice president, finance until his retirement to facilitate
a transition as the company conducts an external search for a chief financial

Brewer has over 30 years of experience with global high technology firms, and
for the last decade has been leading Axcelis' worldwide manufacturing and
supply chain operations. Brewer currently also manages the company's global
facilities and information technology operations. Brewer joined Axcelis in
1999, initially as director of operations, becoming a vice president in 2002.
Prior to joining Axcelis, Brewer was director of operations, Business Jets, at
Raytheon Aircraft Company, a leading manufacturer of business and special
mission aircraft. He also held various management positions in operations and
strategic planning in Raytheon Company's Electronic Systems and Missile
Systems groups. Brewer holds a BS degree in Mechanical Engineering Technology
and a Master's degree in Business Administration.

"I want to thank Jay for his many contributions to Axcelis," commented Mary
Puma, chairman and CEO of Axcelis. "During this last downturn he has worked
with the management team to streamline the business and strengthen our
financial model, including shoring up cash. His efforts have left the company
well positioned to leverage the growth we anticipate as a result of our Purion
products and improving market conditions. We wish him all the best in his
future endeavors."

Puma added, "Kevin Brewer has been a valued member of the Axcelis team for
many years. He has an in depth understanding of the company and will provide
strong leadership in the interim. Our solid financial team, combined with
investor relations assistance from Doug Lawson, our senior vice president of
strategic initiatives, will allow for a smooth transition."

About Axcelis:
Axcelis (NASDAQ: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. The Company's Internet address is:


Maureen Hart (editorial/media) 978.787.4266

Jay Zager (financial community) 978.787.9408

SOURCE Axcelis Technologies, Inc.

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