Axcelis Receives Follow-on Order For Optima HDx High Current Implanter

    Axcelis Receives Follow-on Order For Optima HDx High Current Implanter

Production Proven Platform Demonstrates Advantages in Process Performance,
Productivity and Capital Efficiency

PR Newswire

BEVERLY, Mass., June 5, 2013

BEVERLY, Mass., June 5, 2013 /PRNewswire/ -- Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry, announced that it has received a follow-on order
for its Optima HDx high current implanter from one of the world's leading
chipmakers located in the Asia Pacific region. The customer has a very large
installed base of Optima HDx implanters, where the systems are being used in
high volume manufacturing of leading edge memory products, as well as for the
development of next generation memory devices.

"We're excited that the customer has selected the Optima HDx system with
damage engineering capabilities to expand their capacity. It is testament to
the confidence our customer has in the Optima HDx's process and productivity
advantages," said Mary Puma, chairman and CEO of Axcelis Technologies. "The
Optima HDx includes the industry's most advanced ion source technology, the
Eterna ELS3, coupled with Axcelis' innovative wafer temperature control system
that maximizes yield and profitability, both of which are critical in today's
challenging device manufacturing environment. The Optima HDx delivers this
performance with a simple, low cost and highly reliable design, providing a
significant advantage over more complex and costly competing designs."

The Optima HDx high current implanter provides solutions for device
manufacturers highest dose requirements with the versatility and extendibility
to provide solutions beyond today's 2Xnm technology node. For more information
on the innovative Optima HDx and our complete line of ion implantation
systems, please visit

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. The Company's Internet address is:

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266

Jay Zager (financial community) 978.787.9408

SOURCE Axcelis Technologies, Inc.

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