ASML Holding : ASML, FOM/NWO and UvA/VU plan to establish Institute for Nanolithography

   ASML Holding : ASML, FOM/NWO and UvA/VU plan to establish Institute for
                               Nanolithography

Media Relations and Investor Relations contacts at the end of the press
release

VELDHOVEN and AMSTERDAM, the Netherlands, 27 May 2013 - ASML, the Foundation
for Fundamental Research on Matter (FOM), the University of Amsterdam (UvA),
the VU University Amsterdam and the Netherlands Organisation for Scientific
Research (NWO) announce their intention to establish the Institute for
Nanolithography (INL), which will conduct fundamental and applied research in
areas that are key to unlocking innovation in the global semiconductor
industry.

The initial research program of the INL will focus on physical and chemical
processes that are key for future extensions of Extreme Ultraviolet (EUV)
lithography. This technology is at the forefront of chip manufacturing and is
indispensable for innovation in the global semiconductor industry. The
institute is expected to make important contributions to semiconductor
lithography, which is the key manufacturing technology for making the memory
chips and processors in PCs, smartphones and tablets.

ASML will provide more than one third of the institute's annual budget,
investing roughly EUR 30 million over 10 years. FOM and NWO will contribute
EUR 25 million over 10 years and UvA/VU will make a contribution of EUR 12.5
million. The City of Amsterdam has committed EUR 5 million as start-up
funding. The institute is expected to benefit from the government incentive
for public-private partnerships (TKI) and plans to raise EUR 25 million from
various other funding instruments such as European programs. The overall
initiative amounts to EUR 100 million for 10 years.

The institute will be launched in the third quarter of 2013 under the
management of the FOM Institute AMOLF. By 2015, it will become an independent
institute managed by FOM in collaboration with UvA and VU, and employ about
100 highly qualified scientists and staff, including professors, postdocs, PhD
students, graduate students and technicians. The institute will be located at
the Science Park Amsterdam, embedding the institute among other pioneering
researchers in a stimulating environment for cooperating and exchanging ideas.
The institute will be linked to the education programs of the joint science
faculties of UvA and VU.

"Beyond our existing cooperation with universities and research institutes,
ASML sees a need for long-term, fundamental research in nanolithography, which
focuses not on making a concrete product, but on exploring technology options.
This institute, with its broad research agenda, will expand the
nanolithography knowledge network, contributing to innovation in the
semiconductor industry," said Martin van den Brink, ASML Executive Vice
President and Chief Product and Technology Officer.

"The cooperation between entrepreneurs and researchers is crucial to stay at
the top," said Henk Kamp, Economic Affairs Minister of the Netherlands. "With
this institute, ASML can take on the growing competition and further
strengthen its global market position."

"With this institute, we will give an important new impetus to the top sector
policy in the Netherlands, aimed at increasing the impact of science on our
technology base and economy. The brainstorm sessions scientists organized when
preparing their proposals for this institute have already identified various
research avenues, which have the potential to lead to new technology options.
I am confident the institute will set an example for achieving a win-win
situation for science and industry alike", said Wim van Saarloos, director of
FOM.

Jos Engelen, chairman of the Governing Board of NWO, adds: "This initiative
complies with the ambition of NWO to engage in more longer-term public-private
partnerships and to encourage private industry to increase its contribution to
the funding of scientific research in our country. We are proud that ASML has
sought this partnership with FOM/NWO."

The establishment of the new institute is conditional on contract negotiations
between the partners.

About ASML
ASML is one of the world's leading providers of lithography systems for the
semiconductor industry, manufacturing complex machines that are critical to
the production of integrated circuits or chips. Headquartered in Veldhoven,
the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ under the
symbol ASML. ASML has 8,625 employees on payroll (expressed in full time
equivalents), serving chip manufacturers in more than 55 locations in 16
countries. More information about our company, our products and technology,
and career opportunities is available on our website: www.asml.com

About FOM/AMOLF
The Foundation for Fundamental Research on Matter (FOM, www.fom.nl) promotes,
co-ordinates and finances fundamental physics research in the Netherlands, and
is part of the physics division of the Netherlands Organisation for Scientific
Research (NWO, www.nwo.nl). FOM's annual budget is 99 million euros. AMOLF
(www.amolf.nl) is one of the three research institutes of FOM, located in
Science Park Amsterdam, and carries out research in the field of bioscience
and nanotechnology. AMOLF is renowned for its ability to identify and initiate
novel research areas of strategic importance for Dutch science and industry.
The institute employs about 200 people including more than 100 PhD-students
and postdocs. The Amsterdam bid for the INL was led and coordinated by AMOLF.

About NWO
The Netherlands Organisation for Scientific Research (NWO) is the national
research council in the Netherlands. NWO promotes quality and innovation in
science by selecting and funding the best research. NWO manages research
institutes of national and international importance, contributes to strategic
programming of scientific research and brings science and society closer
together. Research proposals are reviewed and selected by researchers of
international repute. More than 5,000 scientists can carry out research thanks
to funding from NWO.

University of Amsterdam (UvA) and VU University Amsterdam (VU) are leading
international research universities. In 2012, they jointly established the
Amsterdam Academic Alliance (AAA) and initiated the process to create an
integrated Science Faculty. This joint Faculty will be situated at two major
campus locations (Science Park, Zuidas) and will comprise more than 900
scientific staff and 10,000 students. The annual budget of the joint VU and
UvA Science Faculty is 250 million euros. It will bring recognition to
Amsterdam as one of the premier science cities in continental Europe.

Forward Looking Statements
"Safe Harbor" Statement under the US Private Securities Litigation Reform Act
of 1995: the matters discussed in this document may include forward-looking
statements, including statements made about our outlook, realization of
systems backlog, IC unit demand, financial results, average selling price,
gross margin and expenses, dividend policy and intention to repurchase shares
and resignations and appointments of executive officers. These forward looking
statements are subject to risks and uncertainties including, but not limited
to the risk factors included in ASML's Annual Report on Form 20-F and other
filings with the US Securities and Exchange Commission.

Media Contacts
ASML Corporate Communications
Lucas van Grinsven - +31 40 268 3949 - corpcom@asml.com
Niclas Mika - +31 40 268 9670 - corpcom@asml.com

AMOLF
Albert Polman (director AMOLF) - +31 20 754 7400 - polman@amolf.nl

FOM
Wim van Saarloos (director FOM) - +31 30 600 1226 - wim.van.saarloos@fom.nl

ASML Investor Relations Contacts
Craig DeYoung - +1 480 383 4005 - Tempe, Arizona, USA
Franki D'Hoore - +31 40 268 6494 - Veldhoven, the Netherlands

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