Axcelis Receives Significant Order For High Performance Upgrade From Leading Chip Manufacturer

 Axcelis Receives Significant Order For High Performance Upgrade From Leading
                              Chip Manufacturer

PR Newswire

BEVERLY, Mass., May 16, 2013

BEVERLY, Mass., May 16, 2013 /PRNewswire/ --Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for
the semiconductor industry, announced today that it has received a multiple
system upgrade order from a leading semiconductor manufacturer based in Asia
for Axcelis' new GSD Series High Performance End Station upgrade, designed to
significantly enhance system productivity and process performance. The order
is valued over $1.4 million. The foundry deployed the upgrade to increase
manufacturing capacity in order to meet customer demand, and immediately
realize lower operating costs.

"For over 35 years, Axcelis has been committed to providing long term value to
our customers," said Robert Mahoney, vice president, global service solutions
and quality for Axcelis. "Our award winning Global Support Solutions program
is designed to optimize implanter productivity and process capabilities, to
maximize the return on their capital investment. A key component of this
program is our Performance Upgrades program, which allow for the continuous
improvement of our customers' installed base. The new High Performance End
Station upgrade is doing just that, with customers in high volume production
reporting significantly improved productivity, higher reliability, measurably
reduced particulate levels and enhanced yield."

High Performance End Station Upgrade

The GSD Series High Performance End Station upgrade is one of over 1,000
Axcelis upgrades designed to increase productivity, improve yield, reduce cost
of ownership and extend system lifecycle. The High Performance End Station
upgrade includes innovative new in-vacuum wafer handling hardware that reduces
wafer transfer time for increased productivity, and improves wafer handling
precision and repeatability which greatly influence yield. New features also
streamline set-up and alignment for ease of maintenance. This upgrade is
available for the GSD platform high current and high energy systems, as well
as many SEN implanters. For more information this upgrade, and many others,
please visit the company's Knowledge Center or contact an Axcelis account

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing
innovative, high-productivity solutions for the semiconductor industry for
over 35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life cycle support
of ion implantation systems, one of the most critical and enabling steps in
the IC manufacturing process. The Company's Internet address is:

Company Contacts:

Maureen Hart (editorial/media) 978.787.4266

Jay Zager (financial community) 978.787.9408

SOURCE Axcelis Technologies, Inc.

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