STMicroelectronics : STMicroelectronics Leads European Research to Secure Lead
in Advanced MEMS Devices
Lab4MEMS, an ENIAC Pilot-Line project, leverages ST's end-to-end MEMS
facilities to develop enabling technologies for next-generation applications
Geneva, April 4, 2013 - STMicroelectronics (NYSE: STM), a global semiconductor
leader serving customers across the spectrum of electronics applications, has
begun working with research partners to develop a pilot line for
next-generation MEMS devices augmented with advanced technologies such as
piezoelectric or magnetic materials and 3D packaging. The project was launched
by the European Nanoelectronics Initiative Advisory Council (ENIAC) Joint
Undertaking (JU), a public-private partnership in nanoelectronics.
In coordinating the €28m, 30-month Lab4MEMS project, ST is working with
universities, research institutions and technology businesses across nine
European countries. The project benefits from ST's MEMS facilities in France,
Italy and Malta to establish a complete set of manufacturing competencies for
next-generation devices, spanning design and fabrication to test and
With over 800 MEMS-related patents, more than three billion devices shipped
and extensive in-house production capabilities currently producing more than 4
million MEMS devices per day, ST is ideally placed to lead the Lab4MEMS
research into next-generation devices. The project will develop technologies
such as Piezoelectric (PZT) thin films to enhance current pure-silicon MEMS,
enabling improvements such as larger displacement, higher sensing
functionality and greater energy density. These are needed to build smart
sensors, actuators, micro pumps and energy harvesters meeting the demands of
future data-storage, ink-jet, healthcare, automotive, industrial-control and
smart-building applications, as well as consumer applications such as
smartphones and navigation devices.
The project will also develop advanced packaging technologies and vertical
interconnections using flip-chip, through-silicon vias and through-mold vias,
enabling 3D-integrated devices for applications such as body area sensors and
remote monitoring. A key target is to perfect a PZT deposition process
compatible with mass production, and integrate it into complex MEMS processes
to enable innovative actuators and sensors on System-On-Chip industrial
Lab4MEMS is one of the Key Enabling Technologies (KET) Pilot-Line projects
contracted by the ENIAC JU to develop technologies and application areas with
substantial societal impact. "The ENIAC JU research agenda has synergies with
ST's commitment to improving quality of life through technology," said Roberto
Zafalon, European Programs Manager, R&D and Public Affairs,
STMicroelectronics. "Lab4MEMS is an important project that will benefit
consortium members and stakeholders, including ENIAC member states.
Ultimately, we expect the results to translate into long-term prosperity and
valuable knowledge-based employment opportunities."
The ENIAC JU is a public-private partnership involving ENIAC member states,
the European Union, and the Association for European Nanoelectronics
Activities (AENEAS). It is currently contributing some €1.8bn towards the
costs of R&D projects, which it selects through a competitive process
assessing responses to its Calls for Proposals. The Lab4MEMS project,
coordinated by ST, was selected in 2012 and work began in January 2013.
ST is a global leader in the semiconductor market serving customers across the
spectrum of sense and power and automotive products and embedded processing
solutions. From energy management and savings to trust and data security, from
healthcare and wellness to smart consumer devices, in the home, car and
office, at work and at play, ST is found everywhere microelectronics make a
positive and innovative contribution to people's life. By getting more from
technology to get more from life, ST stands for life.augmented.
In 2012, the Company's net revenues were $8.49 billion. Further information on
ST can be found at www.st.com.
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