Applied Materials : Applied Materials' Randhir Thakur Named IEEE Fellow for
Groundbreaking Contributions to Microchip Fabrication
SANTA CLARA, Calif., April 3, 2013 - Dr. Randhir Thakur, executive vice
president and general manager of the Silicon Systems Group at Applied
Materials, Inc. has been named Fellow of the Institute of Electrical and
Electronics Engineers (IEEE). Fellow is the highest grade of IEEE membership
and is recognized by the technical community as a prestigious honor and an
important career achievement. The grade of Fellow is conferred by the IEEE
Board of Directors upon a person with an extraordinary record of
accomplishments in any of the IEEE fields of interest.
Dr. Thakur is recognized for his leadership in development and implementation
of single-wafer technology in semiconductor manufacturing. Dr. Thakur's noted
achievements in the development and commercialization of single-wafer rapid
thermal processing (RTP) technology led to significant improvements in device
performance and manufacturing cycle time when compared to conventional batch
methods. Single-wafer RTP refers to a semiconductor manufacturing process
which quickly heats individual silicon wafers up to 1,200°C or more.
"For over two decades, Randhir has been committed to his vision of enabling
modern transistor fabrication through single-wafer equipment technology," said
Applied Materials chairman and chief executive officer, Mike Splinter. "I am
proud Randhir realized his vision at Applied Materials. He built our Front End
Products business unit into a major division within Applied and he now runs
our entire semiconductor equipment group."
Dr. Thakur systematically developed RTP applications in the areas of
oxidation, dopant activation, heated reflow and foundational work in metrology
and control. His seminal work has led to the widespread adoption of RTP
technology in the manufacture of dynamic random access memory (DRAM)
integrated circuits, where RTP enabled scaling below the 0.6 micron technology
node and ultimately into the sub-50 nanometer regime. Once proven in DRAM
manufacturing, RTP found widespread adoption in the manufacture of other
devices such as logic, non-volatile memory, analog and microelectromechanical
systems (MEMS). Today, RTP is a fundamental enabling technology in the
fabrication of the most advanced semiconductor devices.
[IMG]Dr. Thakur also championed the vision of integrating RTP and other
semiconductor processes such as deposition, in a single machine, to enable
improved transistor performance. He correctly forecasted the need for ambient
environment control and interface management in single wafer processing,
requiring multi-chamber tools that are now standard in advanced semiconductor
Dr. Thakur received a Bachelor of Science degree with honors in electronics
and telecommunications engineering from the Regional Engineering College,
Kurukshetra, India. He received a Master of Science degree in electrical
engineering from the University of Saskatchewan, Canada, and a Ph.D. in
electrical engineering from the University of Oklahoma. He holds more than 300
patents and has published more than 200 papers, with the majority focusing on
single-wafer semiconductor process technology.
Dr. Thakur successfully transitioned from technical leadership into executive
business leadership roles. His experience includes senior positions at Micron,
SanDisk, Marvell Technology and Applied Materials.
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in providing
innovative equipment, services and software to enable the manufacture of
advanced semiconductor, flat panel display and solar photovoltaic products.
Our technologies help make innovations like smartphones, flat screen TVs and
solar panels more affordable and accessible to consumers and businesses around
the world. Learn more at www.appliedmaterials.com.
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Connie Duncan (editorial/media) 408.563.6209
Michael Sullivan (financial community) 408.986.7977
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Source: Applied Materials via Thomson Reuters ONE
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