Omron Releases D6F-PH Thermal Flow-Type MEMS Differential Pressure Sensor Aimed at Maximizing Air-Conditioning Efficiency

  Omron Releases D6F-PH Thermal Flow-Type MEMS Differential Pressure Sensor
  Aimed at Maximizing Air-Conditioning Efficiency

Business Wire

KYOTO, Japan -- March 21, 2013

OMRON Corporation (TOKYO:6645)(ADR:OMRNY) today announced the release on March
21 of the D6F-PH MEMS differential pressure sensor^1 featuring Omron’s
newly-developed cutting-edge MEMS thermal flow sensor chip.

Omron's new D6F-PH high-precision thermal flow-type MEMS differential pressure
sensor featuring digi ...

Omron's new D6F-PH high-precision thermal flow-type MEMS differential pressure
sensor featuring digital correction and anomaly detection. (Photo: Business
Wire)

The D6F-PH is a thermal flow-type sensor meaning it is capable of measuring
with superior sensitivity and reproducibility in low pressure environments and
with a wider pressure range than the commonly-used capacitance-type and
piezoelectric-type differential pressure sensors. Embedded ASICs carry out
digital correction (linearity and temperature correction) making the D6F-PH
more precise and less influenced by temperature than conventional analog
output sensors.

The D6F-PH will make it possible to optimize business and household air
conditioning and ventilation control in order to maximize energy efficiency,
and also, for example, increase the accuracy of gas flow control and
monitoring in digital medical equipment such as anesthetic machines and
respirators.

^1 How differential pressure sensors measure flow rates

A constriction is created in a flow channel inside the sensor which causes an
overall drop in pressure in the fluid or gas being measured. Since this drop
in pressure is related to the density and flow velocity of the fluid or gas
being measured, differential pressure sensors can measure flow rates by
comparing the difference in pressure upstream and downstream from the
constriction.

Features

- High precision measurement

The D6F-PH features a new digital correction algorithm that achieves 3% RD
precision, contributing to optimization of control efficiency.

- High flow impedance to reduce the influence of bypass configuration

By increasing the sensor’s flow resistance, the influence of bypass pipe
length and diameter has been reduced, leading to more stable measurement.

- Reduced size increases installation flexibility

The sensor’s dimensions were reduced to 26mm x 22mm x 18mm thanks to a new
flow channel design that makes full use of the latest flow analysis
technology. The reduction of the circuit board footprint will contribute to
the reduction of system sizes.

- Anomaly detection

Sensor element “open,” “short circuit,” and “power supply voltage” anomaly
detection provides greatly enhanced reliability.

Specifications/performance

                                                          
Model                 D6F-PH0025AD1       D6F-PHO505AD3      D6F-PH5050AD3
Measurement range      0 to 250Pa           +/-50Pa             +/- 500Pa
(see note 1)
Calibration gas (see   Air
note 2)
Port type              Barb joint, maximum outside diameter: 4.9mm
Power supply           2.3 to 3.6 VDC
                       20mA max.
Current consumption
                       With no load and Vcc of 3.3 VDC, GND=OVDC, 25 degree C
Resolution             12 bit
Zero point             +/- 0.2Pa
toleration
Span tolerance         +/- 3%R.D.
Temperature            Yes
compensation
Span shift due to
temperature            <+/-0.5% R.D. per 10 degree C
variation
                       25ms typical at 12 bit resolution (50ms maximum)
Response time
                       The processing time is 6ms typical at 12 bit resolution
Gas flow through       < 63mL/min           <23mL/min           <100mL/min
sensor
Interface              I2C
Case material          PPS
Degree of protection   IEC IP40
Withstand pressure     10kPa
Operating              -20 to +80 degrees C (with no condensation or icing)
temperature
Operating humidity     35% to 80% RH (with no condensation or icing)
Storage temperature    -40 to +80 degrees C (with no condensation or icing)
Storage humidity       35% to 80% RH (with no condensation or icing)
Insulation             Between sensor outer cover and lead terminals:
resistance
                       20Ω min (500VDC)
                       Between sensor outer cover and lead terminals:
Dielectric strength
                       500VAC, 50/60Hz min. for 1 minute (leakage current: 1mA
                       max.)
Weight                5.2g

Note 1: At standard atmospheric pressure (1013.25hPa).

Note 2: Dry gas not containing dust, oil, or mist.

Assessment-use demo kits:

Optional conversion board and software-based demo kits are available for use
in assessing sensor performance and device compatibility.

Price: Open price

Sales target: 300 million yen in FY2014

Production plant: Yasu Plant, Omron Corporation

About OMRON

Headquartered in Kyoto, Japan, OMRON Corporation is a global leader in the
field of automation. Established in 1933, Omron has more than 36,000 employees
in over 35 countries working to provide products and services to customers in
a variety of fields including industrial automation, electronic components,
social systems, healthcare, and the environment. The company has regional head
offices in Singapore (Asia Pacific), Beijing (Greater China), Amsterdam
(Europe, Africa, and the Middle East), Chicago (the Americas), Gurgaon
(India), and Sao Paulo (Brazil).

For more information, visit OMRON's website at http://www.omron.com/

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Contact:

Omron Corporation
Masashige Fukumoto, +81-7-7588-9200
Micro Devices Division
Micro Devices HQ
masashige_fukumoto@omron.co.jp
 
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