Mattson Technology Appoints Dr. Fusen E. Chen as President and Chief Executive Officer

Mattson Technology Appoints Dr. Fusen E. Chen as President and Chief Executive 
Officer 
FREMONT, CA -- (Marketwire) -- 02/19/13 --  Mattson Technology, Inc.
(NASDAQ: MTSN), a leading supplier of advanced process equipment used
to manufacture semiconductors, today announced that Dr. Fusen E. Chen
has been appointed President and Chief Executive Officer, and a
member of the Board of Directors effective immediately. He replaces
David Dutton, who will continue to assist the Company during a
transition period.  
Dr. Chen was most recently an executive vice president at Novellus
Systems, with responsibility for all product business units. Prior to
this position, Dr. Chen was the Chief Technology Officer ("CTO") at
Novellus, with the responsibility for defining the company's
technology strategy and direction. As the CTO, Dr. Chen was Novellus'
primary executive interface with customers in Asia. 
Prior to joining Novellus, Dr. Chen spent ten years at Applied
Materials, most recently as the group vice president and general
manager for the company's copper physical vapor deposition and
interconnect product business group. Prior to Applied Materials, Dr.
Chen worked at LSI Logic and SGS-Thomson Microelectronics. 
"Mattson Technology is a company with a great technical foundation
and differentiated capabilities," said Chen. "I look forward to
joining this dynamic team, creating value for our customers and
driving the company's performance and growth." 
"The Board is enormously pleased to welcome Fusen as the President
and CEO of Mattson," said Ken Kannappan, Chairman of the Board.
"Fusen brings nearly thirty years of semiconductor and semiconductor
capital equipment experience from some of the most successful
companies in the industry. He has successfully nurtured long-term
customer relationships, particularly in Asia, and we look forward to
him driving Mattson's future growth." 
"We believe that Mattson's active and continuing implementation of
cost reductions during the past year has put the Company on the right
path and we believe that Fusen will continue to maintain a
streamlined operation while expanding new opportunities for growth,"
Kannappan continued. 
"The Board wants to thank Dave Dutton for his tireless efforts and
significant contributions t
o Mattson over many years. We are very
pleased that Dave will continue to help us during a transition period
and wish him success in his future endeavors," Kannappan concluded. 
"I am pleased that the Company has hired an executive with Fusen's
extensive industry experience and strong customer relationships to
build on what Mattson has accomplished," said Dutton. "I am fully
committed to assisting in a smooth transition." 
About Mattson Technology, Inc. 
Mattson Technology, Inc. designs, manufactures and markets
semiconductor wafer processing equipment used in the fabrication of
integrated circuits. We are a leading supplier of plasma and rapid
thermal processing equipment to the global semiconductor industry,
and operate in three primary product sectors: Dry Strip, Rapid
Thermal Processing and Etch. Through manufacturing and design
innovation, we have produced technologically advanced systems that
provide productive and cost-effective solutions for customers
fabricating current- and next-generation semiconductor devices. For
more information, please contact Mattson Technology, Inc., 47131
Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510)
657-5900. Internet: www.mattson.com. 
"Safe Harbor" Statement Under the Private Securities Litigation
Reform Act of 1995: This news release contains forward-looking
statements. All statements other than statements of historical fact
are statements that could be deemed forward-looking statements,
including but not limited to statements of the plans, strategies and
objectives of management for future operations. Forward-looking
statements address matters that are subject to a number of risks and
uncertainties that can cause actual results to differ materially from
those expressed or implied by such forward-looking statements and
assumptions. Such risks and uncertainties include, but are not
limited to: macroeconomic and geopolitical trends and events;
end-user demand for semiconductors; customer demand for semiconductor
manufacturing equipment; the timing of significant customer orders
for the Company's products; customer acceptance of delivered products
and the Company's ability to collect amounts due upon shipment and
upon acceptance; the Company's ability to timely manufacture, deliver
and support ordered products; the Company's ability to bring new
products to market and to gain market share with such products;
customer rate of adoption of new technologies; risks inherent in the
development of complex technology; the timing and competitiveness of
new product releases by the Company's competitors; the Company's
ability to align its cost structure with market conditions; and other
risks and uncertainties described in the Company's Forms 10-K, 10-Q
and other filings with the Securities and Exchange Commission. The
Company assumes no obligation to update the information provided in
this news release. 
Mattson Technology Investor Contact
J. Michael Dodson
tel +1-510-657-5900
fax +1-510-492-5963
mike.dodson@mattson.com