Toshiba and NuFlare Awarded the 59th Okochi Memorial Grand Production Prize

  Toshiba and NuFlare Awarded the 59th Okochi Memorial Grand Production Prize

           --For Development and Application of LSI Mask Writers--

Business Wire

TOKYO -- February 12, 2013

Toshiba Corporation (Toshiba) (TOKYO:6502) and NuFlare Technology, Inc. (NFT)
(JASDAQ:6256) have been awarded The 59th Okochi Memorial Grand Production
Prize for their joint development and practical application of electron beam
(EB) mask writers. The award ceremony will take place in Tokyo on March 22.

LSI circuits are fabricated by using lithography tools to project and shrink
master circuit patterns onto wafers. The master circuit patterns are first
written on masks by EB mask writers. Previously, most EB mask writers used
point beams to write the patterns, and these had to become smaller with the
scaling of LSIs. This increased the write time for masks and became the key
challenge in improving productivity in mask making.

Toshiba and NFT together developed a practical EB mask writer with better
writing accuracy and productivity that utilizes Variable Shaped Beam (VSB)
mask writing method, where electron beams are formed into desired shapes to
fill in the patterns.

The Companies developed a novel formula and calculation system that achieves
faster and more accurate correction of proximity effect, the phenomenon
whereby scattered electrons from the mask substrate change the beam exposure
degrade the accuracy of mask patterning. The previous technology required a
few days of calculations to achieve the target calculation error of less than
0.5%. The new formula cuts the calculation time to under 1 hour, allowing real
time calculations to be coordinated with pattern writing (beam scanning and
tool stage movements).

The development and application of a high brightness electron source shortens
the mask write time. This was achieved by improving the material of the
electron source and its operating conditions to boost brightness – the amount
of electrons emitted in a certain time. This eventually reduced the time
needed for exposing the electron beams on to the mask by 95%, significantly
reducing the write time.

The Companies will continue to promote innovative technology to meet
increasing demand for mask writers with better accuracy and productivity.

About Toshiba

Toshiba is a world-leading diversified manufacturer, solutions provider and
marketer of advanced electronic and electrical products and systems. Toshiba
Group brings innovation and imagination to a wide range of businesses: digital
products, including LCD TVs, notebook PCs, retail solutions and MFPs;
electronic devices, including semiconductors, storage products and materials;
industrial and social infrastructure systems, including power generation
systems, smart community solutions, medical systems and escalators &
elevators; and home appliances.

Toshiba was founded in 1875, and today operates a global network of more than
550 consolidated companies, with 202,000 employees worldwide and annual sales
surpassing 6.1 trillion yen (US$74 billion). Visit Toshiba's web site


Toshiba Semiconductor & Storage Products Company
Megumi Genchi / Kunio Noguchi, +81-3-3457-3367
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