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KLA-Tencor Announces New eS805™ Electron-Beam Inspection System



       KLA-Tencor Announces New eS805™ Electron-Beam Inspection System

New tool detects electrical issues and small physical defects; helps optimize
high-speed optical wafer inspection systems for preferential capture of
yield-relevant defects

PR Newswire

MILPITAS, Calif., Jan. 29, 2013

MILPITAS, Calif., Jan. 29, 2013 /PRNewswire/ -- Today KLA-Tencor Corporation
(NASDAQ: KLAC) announced the eS805™, a new electron-beam inspection system for
leading-edge chip manufacturers. Benefiting from more than twenty years of
KLA-Tencor's e-beam inspection development and manufacturing expertise, the
eS805 offers strong capability in detection of very small defects and defects
that cause electrical problems in the integrated circuit, such as opens,
shorts or reliability issues. The eS805 is also designed to provide
supplementary information to the fab's optical inspection systems, with the
goal of boosting the ability of the optical inspectors to preferentially
capture defects that matter.

"As our customers move toward single-digit nanometer design rules, they will
need unprecedented sensitivity to defects of interest—while sampling enough of
the wafer to catch a defect excursion," said Bobby Bell, executive vice
president of KLA-Tencor's Wafer Inspection Group. "We believe that optical
inspection will continue as the dominant defect inspection approach; its speed
is essential for adequate wafer coverage, and our engineers have demonstrated
some impressive ideas for stretching optical sensitivity to meet our
customers' anticipated requirements. Electron-beam inspection will continue to
complement optical inspection as needed, and we are continuing to innovate
within our e-beam product lines for speed, application breadth and novel
methodologies. The new eS805 represents a significant step forward in
KLA-Tencor's continually evolving e-beam/optical defect solution, a valuable
addition to our industry-leading optical defect inspection/e-beam review
portfolio."

The high performance of the new eS805 is driven by the following advances:

  o New image computer, new auto-focus subsystem, and higher beam current
    densities than other commercially available systems, enabling detection of
    buried electrical defects in "voltage contrast" ("VC") mode over
    relatively large areas of the die;
  o Architecture designed to elicit significant signal from defects hidden at
    the bottom of high aspect ratio (HAR) structures such as FinFETs and 3D
    flash; and
  o Advanced algorithms that, together with the new image computer and
    auto-focus system, enable efficient capture of small defects within
    non-periodic structures, such as logic areas of the cell.

The eS805 is upgradeable from any previous eS3x or eS8xx-series e-beam
inspection system, an approach that helps protect a fab's capital investment.

New eS805 e-beam inspection systems have been shipped to leading logic and
memory chip manufacturers, where they are being used to upgrade existing
e-beam inspection capability or to fulfill requirements for additional
inspection capacity in advanced development and production lines. To maintain
high performance and productivity, the eS805 tools are backed by KLA-Tencor's
global, comprehensive service network. For more information on KLA-Tencor's
eS805 e-beam inspection systems, please visit the product web page at:
http://www.kla-tencor.com/front-end-defect-inspection/eS800-series.html.

About KLA-Tencor:
KLA-Tencor Corporation, a leading provider of process control and yield
management solutions, partners with customers around the world to develop
state-of-the-art inspection and metrology technologies. These technologies
serve the semiconductor, LED and other related nanoelectronics industries.
With a portfolio of industry-standard products and a team of world-class
engineers and scientists, the company has created superior solutions for its
customers for more than 35 years. Headquartered in Milpitas, Calif.,
KLA-Tencor has dedicated customer operations and service centers around the
world. Additional information may be found at www.kla-tencor.com (KLAC-P).

Forward Looking Statements:
Statements in this press release other than historical facts, such as
statements regarding the eS805's expected performance, trends in the
semiconductor industry and the anticipated challenges associated with them,
expected uses of the eS805 by KLA-Tencor's customers, expected compatibility
of the eS805 with other KLA-Tencor tools, and the anticipated cost,
operational and other benefits realizable by users of the eS805 tools, are
forward-looking statements, and are subject to the Safe Harbor provisions
created by the Private Securities Litigation Reform Act of 1995. These
forward-looking statements are based on current information and expectations,
and involve a number of risks and uncertainties. Actual results may differ
materially from those projected in such statements due to various factors,
including delays in the adoption of new technologies (whether due to cost or
performance issues or otherwise), the introduction of competing products by
other companies or unanticipated technological challenges or limitations that
affect the implementation, performance or use of KLA-Tencor's products.

SOURCE KLA-Tencor

Website: http://www.kla-tencor.com
Contact: Investors, Ed Lockwood, Sr. Director, Investor Relations,
+1-408-875-9529, ed.lockwood@kla-tencor.com, or Media, Meggan Powers, Sr.
Director, Corporate Communications, +1-408-875-8733,
meggan.powers@kla-tencor.com
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