Axcelis Showcases Industry Leading Ion Implant Technology At SEMICON Korea
Products Set a New Standard in Precision, Purity and Productivity for 2Xnm and
BEVERLY, Mass., Jan. 28, 2013
BEVERLY, Mass., Jan. 28, 2013 /PRNewswire/ -- Axcelis Technologies, Inc.
(Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions
for the semiconductor industry, announced today that it will showcase its
latest advancements in ion implantation at SEMICON Korea 2013. The event, one
of the most important technology forums in the Asia Pacific region, is being
held January 30^th - February 1^st, at the COEX Center in Seoul, Korea. It
will feature numerous conference programs, over 500 exhibiting companies from
20 countries, and more than 45,000 attendees.
Bill Bintz, executive vice president, product development, engineering and
marketing, commented "We're excited to promote our newest products at SEMI
Korea, which are setting a new standard for industry leading precision, purity
and productivity. Korea continues to be one of the most important regions for
device manufacturing, as a result of their significant investments in both
research and development and manufacturing capabilities. As Korean chipmakers
manage the technological and economic challenges of sub 2Xnm manufacturing and
450mm implementation, they can rely on Axcelis to deliver technology that
provides compelling performance efficiencies and cost advantages, to drive
customer value and bottom line results."
Axcelis experts will be on hand at the Axcelis Booth (#3506, in Hall D), to
present the company's newest technology for next generation IC manufacturing.
At the show, the Company will be promoting Axcelis' newest entrant to the
implant market, the Purion M™ medium current implanter. The system is designed
to deliver unmatched levels of productivity and energy purity across the
broadest range of medium current implant applications. Its precision angle
control, patented energy filter and constant focal length scanning minimize
device performance variation, providing the highest yield possible.
In addition, Axcelis will be showcasing a wide array of performance upgrades
designed to enhance process control and boost productivity. Axcelis offers
customers over 1000 upgrades to extend their system lifecycle and maximize the
return on their capital investments. This number is a testament to Axcelis'
dedication to provide customers with a continuous, cost effective improvement
path for all of our product lines. Upgrades being promoted at the show include
the new Eterna™ ELS3 ion source, powerful new software control systems, high
performance end station upgrades, and thin wafer handling system upgrades.
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., provides innovative,
high-productivity solutions for the semiconductor industry. Axcelis is
dedicated to developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation systems, one
of the most critical and enabling steps in the IC manufacturing process. The
Company's Internet address is: www.axcelis.com.
Maureen Hart (editorial/media) 978.787.4266
Jay Zager (financial community) 978.787.9408
SOURCE Axcelis Technologies, Inc.
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