Carl Zeiss Gains Ground in Mainland China

  Carl Zeiss Gains Ground in Mainland China

SMIC, the largest and most advanced foundry in Mainland China, placed an order
with Carl Zeiss for a tool bundle for qualification, repair and metrology of

Business Wire

SHANGHAI -- January 22, 2013

The Semiconductor Manufacturing International Corporation (SMIC),
headquartered in Shanghai, China, have purchased multiple systems for
photomask verification, repair and metrology from Carl Zeiss Semiconductor
Metrology Systems (SMS) Division (, a leading supplier of
both photomask metrology and manufacturing equipment. SMIC will apply the
tools as economic solutions for their mask services.

"This step is strategically very important for Carl Zeiss SMS as the
semiconductor market in China is still on an emerging path." states Dr. Oliver
Kienzle, CEO of Carl Zeiss SMS GmbH.

SMIC purchased an AIMS™ system for qualifying their photomasks for the
advanced node and beyond. To repair the detected defects SMIC will use the
ZEISS MeRiT® MG system, which allows high end mask repair based on the
state-of-the-art e-beam mask repair platform. New to the SMIC production line
will be the metrology tool PROVE®, which will be applied for high performance
image placement measurements.

SMIC is one of the leading semiconductor foundries worldwide, providing
integrated circuit (IC) foundry and technology services at 0.35-micron to

Carl Zeiss Semiconductor Manufacturing Technology

The Semiconductor Manufacturing Technology business group includes the Laser
Optics and Semiconductor Metrology Systems business units. With a broad
portfolio of products and globally leading know-how in the areas of
lithography and optical modules, the business group covers various key
processes in microchip production: as a developer and manufacturer of
lithography optics, for example, Semiconductor Manufacturing Technology is a
technology and market leader in this sector of the semiconductor industry. The
portfolio of Laser Optics includes optical components for lithography lasers
and subsystems for wafer inspection systems. With its inspection, repair and
metrology systems, Semiconductor Metrology Systems focuses on the photomask,
one of the core components of chip fabrication. In fiscal year 2011/12 the
business group generated revenue of around 967 billion euros with a workforce
of about 2,600 people. The business group is headquartered in Oberkochen,


Carl Zeiss
Leila Hammad, Carl Zeiss
Semiconductor Manufacturing Technology
Phone: +49 3641 64-2242