KLA-Tencor Launches ICOS® WI-2280 Wafer Inspector for LED and Adjacent Markets

KLA-Tencor Launches ICOS® WI-2280 Wafer Inspector for LED and Adjacent Markets

System Designed to Provide Manufacturers Greater Flexibility, Reduced Cost of
Ownership and Improved Efficiency

PR Newswire

MILPITAS, Calif., Dec. 4, 2012

MILPITAS, Calif., Dec. 4, 2012 /PRNewswire/ --KLA-Tencor Corporation (NASDAQ:
KLAC) today announced its next-generation light-emitting diode (LED) patterned
wafer inspection tool, the ICOS WI-2280. Designed specifically for defect
inspection and 2D metrology for LED applications, the ICOS WI-2280 also
provides enhanced inspection capabilities and increased flexibility for
microelectromechanical systems (MEMS) and semiconductor wafers spanning two
inches to eight inches in size.

The ICOS WI-2280 represents KLA-Tencor's fourth generation LED wafer
inspection system that is built on its market-leading WI-22xx platform,
delivering sensitivity with increased throughput for reduced cost of
ownership. Additionally, the tool supports handling of whole wafers in
carriers and diced wafers in hoop ring or film frame carriers to accommodate
multiple media with minimal equipment changeover time. The WI-2280 also
features an enhanced rule-based binning defect classification and recipe
qualification engine, enabling manufacturers to achieve faster yield learning
during production ramps, as well as improve process control and process tool
monitoring strategies in their manufacturing process.

"Increasingly, LED manufacturers are demanding improved detection and
classification of yield relevant defects of interest, which enables them to
take faster corrective actions to improve their yields at higher inspection
throughput. There is also a growing need to boost productivity by enabling
faster production recipe creation," said Jeff Donnelly, group vice president,
Growth and Emerging Markets (GEM) at KLA-Tencor. "The ICOS WI-2280 addresses
critical market requirements—ultimately enabling LED manufacturers to achieve
better lumens per watt and lumens per dollar performance. We remain committed
to advancing our industry-leading ICOS product line to meet the LED
community's emerging needs."

Building on the market-leading ICOS WI performance, the ICOS WI-2280 includes:

  oHighly flexible advanced optical modes with dedicated image
    processing—enabling high defect capture rate and recipe robustness against
    varying process background
  oUnique defect classification—delivering faster time to information
  oAdvanced recipe tuning engine with best known methods—allowing faster
    recipe qualification
  oEnhanced metrology capability—offering additional yield-relevant
    actionable data with no impact to throughput
  oFront-end to back-end-of-line connectivity analysis capability—delivering
    a single platform for defect source analysis
  oEasy-to-use inline or offline reclassification engine—enabling
    post-inspection yield improvements for enhanced productivity

In addition to LED application environments, MEMS, semiconductor, compound
semiconductor and power device markets can leverage the ICOS WI-2280 tool for
back-end-of-line and post-dicing outgoing quality control or binning;
front-end-of-line patterned wafer inspection for baseline yield improvement,
rework, excursion control or overlay; and 2D surface inspection and metrology.
As part of KLA-Tencor's LED portfolio, the ICOS WI-2280 works in conjunction
with KLA-Tencor's Candela^® LED unpatterned wafer inspection system and
Klarity^® LED automated analysis and defect data management system, leveraging
over 35 years of expertise to provide manufacturers comprehensive, end-to-end
inspection coverage.

All tools are backed by KLA-Tencor's global, comprehensive service network.
For more information on KLA-Tencor's LED market offerings, please visit
www.kla-tencor.com.

About KLA-Tencor:

KLA-Tencor Corporation, a leading provider of process control and yield
management solutions, partners with customers around the world to develop
state-of-the-art inspection and metrology technologies. These technologies
serve the semiconductor, data storage, LED and other related nanoelectronics
industries. With a portfolio of industry-standard products and a team of
world-class engineers and scientists, the company has created superior
solutions for its customers for more than 30 years. Headquartered in Milpitas,
California, KLA-Tencor has dedicated customer operations and service centers
around the world. Additional information may be found at www.kla-tencor.com.
(KLAC-P)

SOURCE KLA-Tencor

Website: http://www.kla-tencor.com
Contact: Investor Relations, Ed Lockwood, Sr. Director, Investor Relations,
+1-408-875-9529, ed.lockwood@kla-tencor.com, or Media Relations, Meggan
Powers, Sr. Director, Corporate Communications, +1-408-875-8733 ,
meggan.powers@kla-tencor.com
 
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