Axcelis Technologies and Lam Research Enter Strategic Collaboration Agreement on Ion Implant, Dry-Strip, and Etch

Axcelis Technologies and Lam Research Enter Strategic Collaboration Agreement
                     on Ion Implant, Dry-Strip, and Etch

- Agreement Reflects Trend of Increased Semiconductor Industry Collaboration
to Manage the Complexity and Cost of Technology Inflection Points

- Axcelis to Focus Exclusively on Ion Implant and Divest Dry-Strip Technology
to Lam

PR Newswire

BEVERLY, Mass., and FREMONT, Calif., Dec. 4, 2012

BEVERLY, Mass., and FREMONT, Calif., Dec. 4, 2012 /PRNewswire/
--Semiconductor equipment makers Axcelis Technologies, Inc. (NASDAQ: ACLS)
and Lam Research Corp., (NASDAQ: LRCX) today announced a strategic
collaboration agreement focusing on the interrelationship between ion
implantation, etch processes, and photoresist strip applications, including
material modification implants and high-dose implant strip (HDIS). Separately,
Axcelis decided that it will exit the dry-strip business and divest its
dry-strip intellectual property and technology, including the advanced
non-oxidizing process technology of its Integra product line, to Lam Research,
allowing Axcelis to focus exclusively on the ion implant market. Axcelis will
continue to ship its 300 mm dry-strip products through August 2013, and
support the large Axcelis installed base indefinitely, including all existing
parts and service contracts.

For Lam, in addition to acquiring all of Axcelis' dry-strip IP, the
collaboration agreement provides for cooperation with Axcelis in the area of
advanced implant technology focused on further strengthening its
industry-leading etch, dry-strip, clean, and deposition offerings.
Contamination from improperly prepared surfaces, particularly after high-dose
implants, can affect the deposition and adhesion of subsequent layers,
impacting device yield. Advanced semiconductor nodes can use material
modification implant techniques in conjunction with advanced etch processes to
achieve improved device performance.

Mary Puma, chairman and CEO of Axcelis stated, "Axcelis is excited to be
working closely with Lam under the collaboration agreement to provide
customers solutions where implant, etch, and dry-strip processes interact.
Axcelis made the strategic decision to focus on the ion implantation market
and we believe that Lam Research, already a leader in dry-strip, is the best
company to utilize its existing dry-strip products to provide both Axcelis and
Lam customers with continued access to superior dry-strip technology."

The semiconductor industry is facing a challenging environment of technology
inflection points across multiple device types occurring over the next several
years. "Given the high level of technical and economic challenges across the
industry, partnerships and collaboration between companies with complementary
technologies can add meaningful value to customers by delivering better
solutions, faster," said Martin Anstice, president and CEO of Lam Research.
"Lam is focused on developing collaboration activity throughout the industry
ecosystem to leverage its broad resources, solid industry relationships, and
deep technical expertise to help customers realize greater value from their

About Axcelis:
Axcelis (NASDAQ: ACLS), headquartered in Beverly, Mass., provides innovative,
high-productivity solutions for the semiconductor industry. Axcelis is
dedicated to developing enabling process applications through the design,
manufacture, and complete life cycle support of ion implantation systems. The
Company's Internet address is:

About Lam Research:

Lam Research Corporation is a major supplier of innovative wafer fabrication
equipment and services to the worldwide semiconductor industry. For more than
30 years, the Company has driven continuous improvements in chip performance,
power consumption, and cost, contributing to the global proliferation of
smartphones, computers, tablets, and other electronic products. Lam Research
has been the leading supplier of high-throughput plasma etch equipment for
more than a decade and expanded its product offerings in 2008 to include
single-wafer clean systems. The Company added thin-film deposition and wafer
surface preparation technologies to its product portfolio in 2012 with the
acquisition of Novellus Systems, Inc. Headquartered in Fremont, Calif., Lam
Research maintains a global network of service facilities throughout North
America, Asia, and Europe to rapidly meet the needs of its global customer
base. It is an S&P 500^® company and NASDAQ-100^® company whose common stock
trades on the NASDAQ Global Select Market^SM under the symbol LRCX. For more
information, please visit

Caution Regarding Forward-Looking Statements

This announcement contains, or may contain, "forward-looking statements"
concerning Lam Research and Axcelis, which are subject to the safe-harbor
provisions created by the Private Securities Litigation Reform Act of 1995.
Generally, the words "believe," "will," "may," and other future-oriented terms
identify forward-looking statements. Forward-looking statements include, but
are not limited to, statements relating to the expected benefits of the
collaboration, Lam Research's ability to strengthen its technology offerings,
the ability of certain technologies to achieve improved performance, future
industry developments and trends, the statements set forth in the CEO quotes,
and any assumptions underlying any of the foregoing statements.

These forward-looking statements are based upon the current beliefs and
expectations of the management of Lam Research and Axcelis and involve risks
and uncertainties that could cause actual results to differ materially from
those expressed in the forward-looking statements. Many of these risks and
uncertainties relate to factors that are beyond Lam Research's and Axcelis'
ability to control or estimate precisely and include, without limitation: the
ability to realize expected benefits from the collaboration to the extent
anticipated; the potential impact to customer, supplier, employee, and other
relationships caused by the announcement; customer requirements and the
ability to satisfy those requirements; and other risks and uncertainties,
including those detailed from time-to-time in Lam Research's and Axcelis'
periodic reports (whether under the caption "Risk Factors" or "Forward Looking
Statements" or elsewhere). Neither Lam Research nor Axcelis can give any
assurance that such forward-looking statements will prove to have been
correct. The reader is cautioned not to place undue reliance on these
forward-looking statements, which speak only as of the date of this
announcement. Neither Lam Research nor Axcelis nor any other person undertakes
any obligation to update or revise publicly any of the forward-looking
statements set out herein, whether as a result of new information, future
events or otherwise, except to the extent legally required.

Axcelis Technologies Company Contacts:
Jay Zager, Axcelis Technologies: +1-978-787-9408,
Maureen Hart, Corporate Communications: +1-978-787-4266,

Lam Research Company Contacts:
Ed Rebello, Corporate Communications: +1-510-572-6603,
Shanye Hudson, Investor Relations: +1-510-572-4589,

SOURCE Axcelis Technologies, Inc.; Lam Research Corp.

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